Patents Assigned to KLA Corporal
  • Patent number: 11906770
    Abstract: A monolithic optical retarder formed from a monolithic prism may include an input face for receiving a light beam, an output face aligned with an optical axis of the light beam prior to entering the input face, and three or more reflection faces. The three or more reflection faces may be oriented to provide an optical path for the light beam from the input face to the output face via reflection by the three or more reflection faces, where the monolithic optical retarder imparts a selected optical retardation on the light beam based on total internal reflection on at least one of the reflection faces. Further, the input face, the output face, and the three or more reflection faces may be oriented such that an optical axis of the light beam exiting the output face is equal to the optical axis of the light beam entering the input face.
    Type: Grant
    Filed: December 2, 2021
    Date of Patent: February 20, 2024
    Assignee: KLA Corporal
    Inventors: Shankar Krishnan, David Y. Wang