Patents Assigned to KLA Systems, Inc.
  • Patent number: 10226746
    Abstract: The present technology relates to a gas transfer system having removable nozzle assemblies, ejectors or other gas transfer device(s). The nozzle assemblies are removably connected to a monolithic liquid/gas manifold. The present technology also provides nozzle assemblies having an inner nozzle, an outer nozzle adapted for connection to the inner nozzle, and a pipe adapter for connecting the inner nozzle to a liquid manifold.
    Type: Grant
    Filed: June 10, 2016
    Date of Patent: March 12, 2019
    Assignee: KLa Systems, Inc.
    Inventors: Mark Neville, Frederick Siino, Jeffrey Williamson
  • Patent number: 8561972
    Abstract: Certain embodiments of the present technology present a low pressure gas transfer device for transferring gas into a liquid stream. The gas transfer device has a primary pipe branch with a gas injector, and a secondary pipe branch intersecting the primary pipe branch. A liquid stream passing through the secondary pipe branch mixes with the liquid stream passing through the primary pipe branch. The primary outlet port delivers a dispersion stream that is a mixture of gas-injected liquid passing through the primary pipe branch and the secondary liquid stream passing through the secondary pipe branch.
    Type: Grant
    Filed: June 30, 2010
    Date of Patent: October 22, 2013
    Assignee: KLA Systems, Inc.
    Inventor: Mark Neville