Patents Assigned to KLA-Tencop. Corporation
  • Patent number: 5747813
    Abstract: An improved method and apparatus for measuring the relative reflectance spectra of an observed sample (3) and method and apparatus for autofocussing the sample (3). A broadband visible and ultraviolet beam (42) is split into a sample beam (46) and a reference beam (48). The sample beam (46) is reflected off the surface of the sample (3), and the spectrum of the reflected sample beam (46) is compared to the spectrum of the reference beam (48) to determine the relative reflectance spectrum of the sample (3). A video camera (96) is provided for viewing the sample (3). The autofocus system has a course-focus mode and a fine-focus mode. In the course-focus mode, the sample (3) is focused when the centroid of the sample image is centered on a position sensitive detector (99). In the fine-focus mode, the sample is focused when the intensity of light reaching the detector (99) is minimized.
    Type: Grant
    Filed: April 14, 1994
    Date of Patent: May 5, 1998
    Assignee: KLA-Tencop. Corporation
    Inventors: Adam E. Norton, Chester L. Mallory, Hung V. Pham, Paul Rasmussen