Patents Assigned to KLA-Tencor Technologies Corproation
  • Electronically-variable immersion electrostatic lens
    Patent number: 7446320
    Abstract: One embodiment relates to an electronically-variable electrostatic immersion lens in an electron beam apparatus. The electrostatic immersion lens includes a top electrode configured with a first voltage applied thereto, an upper bottom electrode configured with a second voltage applied thereto, and a lower bottom electrode configured with a third voltage applied thereto. The third voltage is controlled separately from the second voltage. Other embodiments are also disclosed.
    Type: Grant
    Filed: October 26, 2005
    Date of Patent: November 4, 2008
    Assignee: KLA-Tencor Technologies Corproation
    Inventors: Mark A. McCord, Kirk J. Bertsche, Francisco Machuca