Patents Assigned to Klocke Nanotechnik
  • Positioning unit and positioning apparatus with at least two positioning units
    Patent number: 6848328
    Abstract: A positioning unit (1) includes an accelerating nanodrive (2), which has a resolution of at least ±10 nm, a slider (5) and a module (6, 7), which has a stationary component (6) and a component (7) movable for this purpose. The component (7) has a mass of less than 500 g and is movably supported relative to the drive (2). The slider (5) and the movable component (7) of the module (6, 7) are securely connected one to the other and the drive (2) can exert accelerations higher than 10 G.
    Type: Grant
    Filed: March 11, 2002
    Date of Patent: February 1, 2005
    Assignee: Klocke Nanotechnik
    Inventor: Volker Klocke
  • Positioning unit and positioning apparatus with at least two positioning units
    Publication number: 20020166398
    Abstract: A positioning unit (1) includes an accelerating nanodrive (2), which has a resolution of at least ±10 nm, a slider (5) and a module (6, 7), which has a stationary component (6) and a component (7) movable for this purpose. The component (7) has a mass of less than 500 g and is movably supported relative to the drive (2). The slider (5) and the movable component (7) of the module (6, 7) are securely connected one to the other and the drive (2) can exert accelerations higher than 10 G.
    Type: Application
    Filed: March 11, 2002
    Publication date: November 14, 2002
    Applicant: KLOCKE NANOTECHNIK
    Inventor: Volker Klocke