Patents Assigned to Koninklijke Philips Electronis B.V.
  • Publication number: 20070236163
    Abstract: In a method for controlling a positioning device, the positioning device has a stator and mover, the mover being movable relative to the stator; a position sensor configured to generate a position signal indicative of a position of the mover relative to the stator; a controller configured to receive the position signal, compare it to a setpoint signal to obtain an error signal, and generate a mover control signal on the basis of a signal component of the position signal, the controller having a variable gain. The positioning device, including the position sensor and the controller, defines a control loop. For error signals having a magnitude in a predefined range, the gain is selectively set to a value higher than a value for error signals having a magnitude outside the range.
    Type: Application
    Filed: April 7, 2006
    Publication date: October 11, 2007
    Applicants: ASML Netherlands B.V., Koninklijke Philips Electronis B.V.
    Inventors: Marcel Heertjes, Yin Tim Tso, Ramidin Kamidi, Dennis Andreas Houben