Abstract: The present invention relates to an ultrashort pulse laser processing device. The ultrashort pulse laser includes a stage a transfer member, a front confocal microscope, a front laser generating unit, and a front highpowered lens. A sample is provided on the stage to be processed, the transfer member transfers the stage, and the front confocal microscope is provided above the stage. The front laser generating unit is provided between the front confocal microscope and the stage to generate an ultrashort pulse laser, and the front high-powered lens focuses the laser provided from the front laser generating unit.
Type:
Application
Filed:
December 27, 2007
Publication date:
May 6, 2010
Applicant:
KOREA INSTITUTE OF MACHINERY & MJATERIALS
Inventors:
Won-Seok Chang, Jae-Gu Kim, Sung-Hak Cho