Abstract: The present disclosure relates to a substrate with multiple nano-gaps and a manufacturing method therefor, and more particularly to a multiple nano-gaps substrate with high absorption and capable of using light sources in a wide range, and a manufacturing method therefor.
Type:
Grant
Filed:
September 24, 2015
Date of Patent:
January 7, 2020
Assignee:
Korea Intitute of Machinery & Materials
Inventors:
Sung Gyu Park, Jung Heum Yun, Dong Ho Kim, Byung Jin Cho, Jung Dae Kwon, Chae Won Mun