Patents Assigned to KOREA POLYTECHNIC UNIV INDUSTRY ACADEMIC COOP FDN
  • Patent number: 11696505
    Abstract: The present invention is directed to a method for manufacturing an ultrasonic fingerprint sensor by using a nanorod structure, the method including: a conductive mold generating step of generating a plurality of rod generation holes; a nanorod generating step of generating nanorods by filling the plurality of rod generation holes with a nano-piezoelectric material; a side electrode generation portion marking step of marking side electrode generation portions; a conductive mold etching step of generating nanorods and side electrodes by performing primary etching on the conductive mold; an insulating material filling step of filling portions with an insulating material; a lower electrode forming step of performing secondary etching and forming lower electrodes; a dummy substrate bonding step of bonding a dummy substrate to a surface on which the lower electrodes are formed; and an upper electrode forming step of removing the conductive substrate base and forming upper electrodes.
    Type: Grant
    Filed: February 4, 2020
    Date of Patent: July 4, 2023
    Assignee: KOREA POLYTECHNIC UNIV INDUSTRY ACADEMIC COOP FDN
    Inventor: Kyoung Kook Kim