Patents Assigned to Korea Reseach Institute of Standards and Science
  • Patent number: 10240253
    Abstract: A method for manufacturing a large-scale single crystal monolayer of hBN including: preparing a single crystal copper substrate of (111) face in a chemical vapor deposition (CVD) apparatus; removing impurities of the single crystal copper substrate of (111) face; forming a plurality of hBN crystal seeds by depositing a vaporized ammonia borane or a vaporized borazine on the surface of the single crystal copper substrate from which the impurities are removed; and forming a large-scale single crystal monolayer of hBN grown by mutual coherence between the hBN crystal seeds, an apparatus for manufacturing the same, and a substrate for a monolayer UV graphene growth using the same.
    Type: Grant
    Filed: October 20, 2016
    Date of Patent: March 26, 2019
    Assignee: Korea Reseach Institute of Standards and Science
    Inventor: ChanYong Hwang