Abstract: The present disclosure relates to an apparatus and a method for a thickness and a profile of a multilayer thin film using a vibration insensitive interference method are provided, which allow measuring the phase of a measurement object by acquiring a plurality of different phase-shifted interference signal images at a time through interference signals between a reference flat and the measurement object by a polarizing beam splitter, a quarter-wave plate, a shutter and a pixelated polarizing camera, and which also allow measuring reflectance of the measurement object by acquiring a plurality of reflected signal images obtained at a time through respective reflected lights for each of a reference surface and the measurement object by a plurality of different polarizers.

Abstract: The present disclosure relates to a reflective FPM using a parabolic mirror, and particularly to a reflective FPM using a parabolic mirror including: a first illuminator having a first panel that is provided with numerous LED light sources and composed of a first LED array irradiating a plurality of first LED beams to a measurement object sequentially at different angles through an objective lens; a second illuminator having a second panel that is provided with numerous LED light sources and composed of a second LED array irradiating a plurality of second LED beams to the measurement object sequentially at different angles, following irradiation from the first illuminator; a parabolic mirror reflecting each of second beams generated from the second illuminator, allowing being incident on the measurement object; a lens configured to collect a beam from the measurement object to which the first and second LED beams were irradiated; and a photodetector receiving light from the lens and acquires images for each o

Abstract: Provided are an integrating sphere photometer and a measuring method of the same. The integrating sphere photometer includes an integrating sphere including a left hemisphere and a right hemisphere, a photometer disposed on the center surface of the right hemisphere, a photometer baffle disposed in front of the photometer to be spaced apart therefrom, a light source to be tested disposed at the center region of the integrating sphere to illuminate light to at least an illumination region of the left hemisphere, an auxiliary lamp part disposed in the vicinity of a contact region between the left hemisphere and the right hemisphere to illuminate light to the illumination region, and an auxiliary lamp baffle disposed around the auxiliary lamp part to prevent the light emitted from the light source to be tested from being directly illuminated to the auxiliary lamp part and also to prevent the light emitted from the auxiliary lamp part from being directly illuminated to the light source to be tested.

Abstract: A system for acquiring data of a multi-channel signal includes a channel-voltage transmission module disposed in a shield room blocking electromagnetic waves, connected with a plurality of channels from which analog signals are output, and configured to generate a serial digital signal having information about an analog signal and information about a channel from which the analog signal is output, and an optical fiber cable through which the serial digital signal is transmitted from the channel-voltage transmission module to the outside of the shield room.

Abstract: The present invention relates to a device for testing resist pressure of a vessel wherein gas is stored at a high compressed state, before the use of the vessel, and to a method for testing resist pressure of a vessel by using the testing device. The device includes: the vessel provided as an object to which a resist pressure test is carried out; an elastic tube placed in the interior of the vessel and adapted to fill a liquid into the interior thereof; a pressurizing means adapted to apply a predetermined pressure to the elastic tube to allow the elastic tube to be expanded; and a pressure gauge adapted to gauge the pressure in the interior of the vessel, wherein a gas is filled into the vessel to apply a predetermined pressure to the interior of the vessel by the expansion of the elastic tube.

Abstract: A 6-axis force sensor includes bumper 10 with bumper axis 12 and press member 11 which has four horizontal beams 11a, 11b, 11c and 11d in a cross shape with end, side and bottom faces. Sensors 31, 32, 33, and 34 on end faces sense force in one direction and sense a moment acting on opposite end faces. Sensors 41, 42, 43, and 44 on side faces sense force in a second direction transverse to the first direction and sense a moment acting on opposite side faces. A film 20 on the bottom faces has four sensors 21, 22, 23, and 24, one on each bottom face, for sensing force in a direction transverse to the first and the second directions and sensing a moment acting on opposite sensors on the film.

Abstract: A method and apparatus are disclosed providing a user interface using a touch input unit comprising a touch screen configured to detect a contact position and a contact force. The method comprises a step of the touch input unit receiving a touch input signal generated by a touch of a user's pointing object, a step of executing a step of a position processing unit identifying a contact position, corresponding to the received touch input signal, and a step of an intensity processing unit analyzing an intensity pattern of contact force, corresponding to the received touch input signal, simultaneously or sequentially, a step of a control unit determining an event corresponding to the touch input signal based on the identified contact position and the analyzed intensity pattern of contact force, and a step of an output unit outputting the determined event to a display screen.

Abstract: Disclosed herein is a method of fabricating nano-components using nanoplates, including the steps of: printing a grid on a substrate using photolithography and Electron Beam Lithography; spraying an aqueous solution dispersed with nanoplates onto the grid portion to position the nanoplates on the substrate; depositing a protective film of a predetermined thickness on the substrate and the nanoplates positioned on the substrate; ion-etching the nanoplates deposited with the protective film by using a Focused Ion Beam (FIB) or Electron Beam Lithography; and eliminating the protective film remaining on the substrate using a protective film remover after the ion-etching of the nanoplates, and a method of manufacturing nanomachines or nanostructures by transporting such nano-components using a nano probe and assembling with other nano-components.

Abstract: Disclosed herein are an apparatus for and method of measuring the composition and the pressure of the discharged gas from an ion gauge by using a residual gas analyzer. In this regard, there are provided a vacuum container 200 divided into a pressure container 210 and a discharge container 220 by means of a partition 235 having an orifice 230 formed thereon; an ion gauge 100 mounted at the pressure container 210 side of the vacuum container 200 for discharging the gas at the time of vacuum formation; a residual gas analyzer 240 mounted at the pressure container 210 side of the vacuum container 200 for measuring the composition and the pressure of the residual gas; pump means disposed at one side of the discharge container 220 of the vacuum container 200 for discharging the inside gas; and heating means disposed at the vacuum container 200 for heating the vacuum container 200 to a predetermined temperature.

Abstract: Disclosed herein are an apparatus for and method of measuring the composition and the pressure of the discharged gas from an ion gauge by using a residual gas analyzer. In this regard, there are provided a vacuum container 200 divided into a pressure container 210 and a discharge container 220 by means of a partition 235 having an orifice 230 formed thereon; an ion gauge 100 mounted at the pressure container 210 side of the vacuum container 200 for discharging the gas at the time of vacuum formation; a residual gas analyzer 240 mounted at the pressure container 210 side of the vacuum container 200 for measuring the composition and the pressure of the residual gas; pump means disposed at one side of the discharge container 220 of the vacuum container 200 for discharging the inside gas; and heating means disposed at the vacuum container 200 for heating the vacuum container 200 to a predetermined temperature.