Abstract: In a system for recycling a high-boiling-point waste photoresist stripper generated in processes of manufacturing LCDs or semiconductor devices, wherein an expensive high-boiling-point stripper solvent can be easily recycled at high yield and high-purity electronic grade. This system includes a first distillation device for removing low-boiling-point impurities, a second distillation device for recycling a stripper solvent composition while removing high-boiling-point impurities, a third distillation device for removing trace water, thus recovering the stripper solvent composition, a fourth distillation device for additionally recycling a stripper solvent, thus additionally recovering a high-boiling-point stripper solvent, and a fifth distillation device for sequentially and separately recovering the stripper solvent composition recovered by the second distillation device and the high-boiling-point stripper solvent additionally recovered by the fourth distillation device.
Type:
Grant
Filed:
January 21, 2015
Date of Patent:
October 27, 2015
Assignee:
KOREX CORPORATION
Inventors:
Ho Kyung Lee, In Gyoo Lee, Myung Jun Park, Kee-Kahb Koo, Jae-Kyeong Kim
Abstract: In a system and method for recycling a high-boiling-point waste photoresist stripper generated in processes of manufacturing LCDs or semiconductor devices, an expensive high-boiling-point stripper solvent can be easily recycled at high yield and high-purity electronic grade.
Type:
Grant
Filed:
February 19, 2014
Date of Patent:
February 24, 2015
Assignee:
Korex Corporation
Inventors:
Ho Kyung Lee, In Gyoo Lee, Myung Jun Park, Kee-Kahb Koo, Jae-Kyeong Kim
Abstract: This invention relates to a system and method for recycling a high-boiling-point waste photoresist stripper generated in processes of manufacturing LCDs or semiconductor devices, wherein an expensive high-boiling-point stripper solvent can be easily recycled at high yield and high-purity electronic grade.
Type:
Application
Filed:
February 19, 2014
Publication date:
August 28, 2014
Applicant:
KOREX CORPORATION
Inventors:
Ho Kyung Lee, In Gyoo Lee, Myung Jun Park, Keeg Kahb Koo, Jae Kyung Kim