Abstract: In a gas filter, a ceramic honeycomb body has a plurality of gas passages. A sealing glass film is attached to the gas exit end face of the ceramic honeycomb body. A fine ceramic film is coated on the inside surface of each gas passage. A sealing member is adhered to the gas inlet and end face of the ceramic honeycomb body. The sealing member is made of a fine ceramic material the pores of which are smaller than the pores of the fine ceramic films. The sealing member has a gas channel in its end face at the gas inflow end such that gas which is introduced through the gas channel may pass into the gass passages from the exterior of the ceramic honeycomb body.

Abstract: Disclosed herein is a gas filter particularly suitable for the filtration of dry gases used in the manufacture of the semiconductors. The gas filter comprises a ceramic honeycomb structural body with numerous gas flow holes and a fine ceramic film coated onto the inner surfaces of the gas flow holes. Filtration is performed by passing the gas to be filtered from the outer peripheral surface of the honeycomb structural body to the gas flow holes.