Abstract: Mono-substituted TSA precursor Si-containing film forming compositions are disclosed. The precursors have the formula: (SiH3)2N—SiH2—X, wherein X is selected from a halogen atom; an isocyanato group; an amino group; an N-containing C4-C10 saturated or unsaturated heterocycle; or an alkoxy group. Methods for forming the Si-containing film using the disclosed mono-substituted TSA precursor are also disclosed.

Abstract: The invention relates to a method and apparatus for separating a mixture containing carbon monoxide, nitrogen and hydrogen by cryogenic distillation in a separation system which includes a denitrification column and at least another column. The method can include separating the mixture in order to obtain a fluid enriched with carbon monoxide and containing nitrogen, separating the fluid in the denitrification column, pressurizing the carbon monoxide flow from the column in a compressor up to a high pressure, collecting a fraction of carbon monoxide flow to be used as a product, expanding an amount of the high-pressure carbon monoxide flow in a valve prior to supplying it to the denitrification column, and varying the flow expanded in the valve according to re-boiling needs of the denitrification column.

Abstract: A method of purifying or separating a gas using a number of adsorbers on phase-shifted cycles, and more particularly to the purification of atmospheric air, prior to cryogenic separation of the said air by cryogenic distillation is provided. More specifically still, it relates to the purification of air with a TSA cycle using radial adsorbers.