Abstract: Embodiments of the invention generally provide apparatus and methods for vaporizing liquid precursors. In one embodiment, a bubbling system for supplying a vapor of liquid precursor is provided including a gas flow conduit having a first end and a second end, a nozzle structure connected to the second end of the gas flow conduit, and comprising one or more perforated conduits fluidly coupled with the second end of the gas flow conduit, and a plate disposed around the gas flow conduit and in a spaced relationship from the nozzle structure, wherein both the one or more perforated conduits and the plate extend radially from an axis of the gas flow conduit.

Abstract: A method of producing at least one air gas using cryogenic distillation is provided. The expanded streams coming from the two turbines are combined and then split into two fractions. The first fraction is sent to the medium-pressure column of the system in gaseous form, whereas the second fraction is returned to the cold end of the heat exchange line. At a temperature T4 below ?100° C. and above T2, the second fraction is sent to a turbine where it expands up to a temperature T5, forming an air stream. This air stream is then warmed in the heat exchange line before being discharged into the atmosphere, so that the distillation is not disturbed. A liquid product is withdrawn from the column system as final product. The sole liquid product from the apparatus is liquid oxygen, but of course other products may be produced.

Abstract: Burner firing method and device are presented where an oxidizing oxygen-fuel burner is fired at an angle to the reducing air-fuel burner flame to reduce overall NOx emissions from high temperature furnaces. The oxidizing oxy-fuel burner stoichiometric equivalence ratio (oxygen/fuel) is maintained in the range of about 1.5 to about 12.5. The reducing air-fuel burner is fired at an equivalence ratio of 0.6 to 1.00 to reduce the availability of oxygen in the flame and reducing NOx emissions. The oxidizing flame from the oxy-fuel burner is oriented such that the oxidizing flame gas stream intersects the reducing air-fuel flame gas stream at or near the tail section of the air-fuel flame. The inventive methods improve furnace temperature control and thermal efficiency by eliminating some nitrogen and provide an effective burnout of CO and other hydrocarbons using the higher mixing ability of the oxidizing flame combustion products.