Patents Assigned to L'Air Liquide Societe Anonyme pour l'Etude et l- l'Exploitation des Procedes Georges Claude - Justia Patents Search

Patents Assigned to L'Air Liquide Societe Anonyme pour l'Etude et l- l'Exploitation des Procedes Georges Claude

DEVICE FOR SUPPLYING THE LIQUID MATERIAL INSIDE A FILLING CONTAINER AND METHOD OF CONTROLLING THE LIQUID LEVEL INSIDE THE FILLING CONTAINER FOR SAID LIQUID MATERIAL SUPPLY DEVICE

Publication number: 20120018037

Abstract: Disclosed are methods and apparatuses for supplying a liquid and controlling its level inside of a container. In particular, the liquid inside of the container may be a liquid material suitable for use in a chemical vapor deposition process, wherein the liquid is controlled and supplied in a manner which minimizes the introduction of impurities.

Type: Application

Filed: January 27, 2010

Publication date: January 26, 2012

Applicant: L'Air Liquide Societe Anonyme pour l'Etude et l- l'Exploitation des Procedes Georges Claude

Inventors: Toshiyuki Nakagawa, Takamitsu Shigemoto, Yoshio Uetake, Masahiro Kimoto, Tetsuro Shigeno, Masaaki Muro, Naoyuki Nakamoto