Patents Assigned to Labeille S.A.
  • System for diluting ultrapure chemicals which is intended for the microelectronics industry
    Patent number: 6146008
    Abstract: System for diluting an ultrapure concentrated chemical including: (i) a first tank which contains the chemical in concentrated form having a predetermined purity P, (ii) a supply of ultrapure water of purity at least equal to P, (iii) a second tank for mixing the concentrated chemical with the ultrapure water to obtain a solution of diluted chemical whose purity is at least equal to P, (iv) a structure for adjusting the titre of the solution of diluted, chemical to a desired final concentration.
    Type: Grant
    Filed: April 9, 1998
    Date of Patent: November 14, 2000
    Assignee: Labeille S.A.
    Inventors: Thierry Laederich, Herve Dulphy, Georges Guarneri