Abstract: A microfabricated electrochemical gas sensor is disclosed. The sensor includes electrodes produced from conductor layers, a capping layer, microcavities through the conductor layers and the capping layer, a cavity connecting the microcavities, and an electrolyte filling in the space created by the cavity and the microcavities in the substrate. The microcavities allow gases to pass through but retain the electrolyte through surface tension.

Abstract: This invention describes an electrochemical gas sensor that utilizes microfabrication to achieve miniaturization without using a membrane. The sensor is comprised of thin film electrodes and insulators, and micro cavities in them. The micro cavities are filled with a liquid electrolyte that is kept in the micro cavities by surface tension.

Abstract: This invention describes an electrochemical gas sensor that utilizes microfabrication to achieve miniaturization without using a membrane. The sensor is comprised of thin film electrodes and insulators, and micro cavities in them. The micro cavities are filled with a liquid electrolyte that is kept in the micro cavities by surface tension.

Abstract: An eddy current probe for nondestructive evaluation of an object made of an electrically conductive material with a planar or curved surface, comprising: an excitation portion, consisting of a plurality of multi-turn conductive coils and a bar core, the bar core having a primary surface in proximity to the outer surface of the object to be inspected, each multi-turn coil formed by winding a conductor along the core with each wound equally spaced and parallel on the primary surface of the core, multi-turn coils intersecting from one to another on the primary surface of the core and forming a plurality of congruent grid shapes with the winding conductors, each multi-turn coil is energized by an AC current with each of AC currents at a phase difference from one to another; and a sensing portion, consisting of a plurality of magnetic field sensors with each of the sensors positioned in proximity to the symmetric center of congruent grid shapes, each magnetic field sensor having a sensitivity axis is placed with i

Abstract: An eddy current probe for nondestructive evaluation of an object made of an electrically conductive material with a planar or curved surface, comprising: an excitation portion, consisting of a plurality of multi-turn conductive coils and a bar core, the bar core having a primary surface in proximity to the outer surface of the object to be inspected, each multi-turn coil formed by winding a conductor along the core with each wound equally spaced and parallel on the primary surface of the core, multi-turn coils intersecting from one to another on the primary surface of the core and forming a plurality of congruent grid shapes with the winding conductors, each multi-turn coil is energized by an AC current with each of AC currents at a phase difference from one to another; and a sensing portion, consisting of a plurality of magnetic field sensors with each of the sensors positioned in proximity to the symmetric center of congruent grid shapes, each magnetic field sensor having a sensitivity axis is placed with i

Abstract: A three-axis magnetic field sensing device, a magnetometer, and methods of fabricating and testing are presented. The magnetometer comprises a plurality of sloped surfaces. A plurality of magnetic sensing units is disposed on the slopes. A magnetic field can be measured by the sensing units. Each of the three orthogonal-axis components of the magnetic field, a Euclidean vector, can then be solved by using a simple algorithm as an expression of the sensing unit measurement values and slope angles. Polarization, testing and characterization of the device could be done by applying a magnetic field along a common axis to all sensing units, along which each sensing unit has sensitivity.