Patents Assigned to Lam Research Corportion
  • Platen assembly having a topographically altered platen surface
    Publication number: 20030032379
    Abstract: An apparatus for improving performance of a wafer polishing apparatus is described. The apparatus includes a platen in a support assembly having a plurality of fluid channels and at least one region of altered topography positioned on a portion of the platen surface.
    Type: Application
    Filed: August 8, 2001
    Publication date: February 13, 2003
    Applicant: Lam Research Corportion
    Inventors: Travis R. Taylor, Cangshan Xu, Kevin T. Crofton, Eugene Yuexing Zhao