Patents Assigned to Lam Researech Corporation
  • Monolithic manifold mask and substrate concepts
    Patent number: 10118263
    Abstract: Component-locating templates or masks for use with positioning fluid-flow components on monolithic ceramic substrates are provided, as well as techniques for the manufacture of such templates.
    Type: Grant
    Filed: September 2, 2015
    Date of Patent: November 6, 2018
    Assignee: Lam Researech Corporation
    Inventors: Michael C. Kellogg, Andrew C. Lee, Christopher J. Pena