Patents Assigned to Lamba Physik Gesellschaft zur Herstelling von Lasern mbH
  • Excimer laser comprising a gas reservoir and a collecting receptacle and a method of refilling the gas reservoir of the laser with halogen gas
    Patent number: 5396514
    Abstract: An excimer laser including a gas reservoir in which gas discharge is effected with the participation of halogen gas, comprises a collecting receptacle which communicates both with the gas reservoir and a halogen gas supply through conduits provided with shutoff valves. This apparatus is suitable for carrying out a method of refilling the gas reservoir of the excimer laser with halogen gas even if the pressure of the halogen gas supply is low and its volume restricted.
    Type: Grant
    Filed: March 1, 1993
    Date of Patent: March 7, 1995
    Assignee: Lamba Physik Gesellschaft zur Herstelling von Lasern mbH
    Inventor: Frank Voss