Abstract: A control circuit for a pulsed gas laser comprises a plurality of sensors 9, 12, a plurality of control members (e.g. 10) and a central control unit 13. Associated sensors and control members, i.e. sensors which measure a parameter variable by the associated control member, are connected jointly to modules 7, 8, 11 and each module comprises at least one microprocessor; the modules are connected by means of optical waveguides 20 in series in a ring to the central control unit 13. The arrangement makes it possible to save complicated electromagnetic shielding, provides easy fault tracing and simple expansion of the control circuit by further modules.

Abstract: A circuit for the preionization and main discharge of a pulsed gas laser provides that the sparks intended for the preionization of the working gas have an independent switch function. Capacitive energy storage means 7, 8, 9, 10 are connected low-inductively to the spark electrodes 3, 4, 5, 6. The current flowing in the spark discharge is used selectively for the preionization by means of the spark or for generating a compressed high-voltage pulse. The compressed high-voltage pulse is applied as prepulse to the main electrodes to momentarily greatly increase the voltage obtaining between the main electrodes and thus initiate and supply a homogeneous main discharge.