Patents Assigned to Lambda Physik Gesellschaft zur Herstellung von Lasern mbH
  • Publication number: 20010000606
    Abstract: A device for flushing the optical path of a UV laser beam has a casing (18) with which the optical path is separated from the external atmosphere (26). In order to maximize the life of the optical components (24, 26) in the optical path, a noble gas, in particular argon, is used for flushing the optical path.
    Type: Application
    Filed: December 1, 2000
    Publication date: May 3, 2001
    Applicant: LAMBDA PHYSIK GESELLSCHAFT ZUR HERSTELLUNG VON LASERN MBH
    Inventors: Andreas Gortler, Andreas Haupt
  • Patent number: 6038240
    Abstract: Even in the case of variations in the pulse repetition frequency, a solid-state laser generates laser pulses with constant beam characteristics in such a way that when the pulse repetition frequency of the laser pulses is varied the pulse duty factor of the pumping radiation is kept constant and Q switching is triggered in each case at a prescribed period after the start of the pumping pulse.
    Type: Grant
    Filed: January 16, 1998
    Date of Patent: March 14, 2000
    Assignee: Lambda Physik Gesellschaft zur Herstellung von Lasern mbH
    Inventors: Nils Deutsch, Thomas Schroder, Uwe Stamm, Wolfgang Zschocke
  • Patent number: 5838701
    Abstract: A Q-switched solid-state laser has a narrow-band laser diode (18) whose narrow-band output radiation serves as seed radiation for exciting a solid (14), with the result that only a single wavelength-stable longitudinal mode oscillates in the resonator (10, 12) of the solid-state laser and corresponding radiation (16) is emitted.
    Type: Grant
    Filed: February 20, 1997
    Date of Patent: November 17, 1998
    Assignee: Lambda Physik Gesellschaft Zur Herstellung Von Lasern mbH
    Inventors: Nils Deutsch, Thomas Schroder, Uwe Stamm, Wolfgang Zschocke
  • Patent number: 5761236
    Abstract: A laser, especially an excimer laser, is designed to generate narrow-band radiation and comprises a laser resonator, including two reflecting elements (12, 14) between which there is disposed a laser active medium (10), and further comprises a group of several refractive dispersive elements (32, 34) arranged in the laser beam path and each deflecting, incident light at an angle (.gamma..sub.a, .gamma..sub.b) which is specific of the wavelength of the incident light. It is provided to reduce variations of the emission wavelength which are temperature responsive and time dependent during burst operation by giving at least one of the refractive dispersive elements (32) a refractive index which increases as the temperature goes up and at least one of these elements (34) a refractive index which drops as the temperature rises.
    Type: Grant
    Filed: July 18, 1996
    Date of Patent: June 2, 1998
    Assignee: Lambda Physik Gesellschaft zur Herstellung Von Lasern mbH
    Inventors: Jurgen Kleinschmidt, Peter Heist
  • Patent number: 5729565
    Abstract: An electrode for a gas discharge laser. Electrodes which consist, at least in part, of zirconium are suggested for use in gas discharge lasers containing fluorine.
    Type: Grant
    Filed: November 7, 1996
    Date of Patent: March 17, 1998
    Assignee: Lambda Physik Gesellschaft zur Herstellung von Lasern MBH
    Inventors: Anton Meller, Frank Voss
  • Patent number: 5663973
    Abstract: A tunable narrowband source of a coherent radiation, comprisinga first optical parametric oscillator (OPO1) which includes at least one first optical parametric amplifier medium (K.sub.1) in a resonator (18, 20; 20, 34) or an optical parametric generator;at least one second optical parametric oscillator (OPO2) which includes at least one second optical parametric amplifier medium (K.sub.
    Type: Grant
    Filed: June 10, 1996
    Date of Patent: September 2, 1997
    Assignee: Lambda Physik Gesellschaft zur Herstellung von Lasern mbH
    Inventors: Uwe Stamm, Ingo Klaft, Vadim Berger, Stefan Borneis, Peter Lokai
  • Patent number: 5661595
    Abstract: A tunable, optical, parametric oscillator including at least one non-linear optical crystal (10) comprises a first deflector mirror (18) arranged inside the resonator between the resonator mirror (12) and the crystal (10) to couple in the pump radiation (16) as well as a second deflector mirror (20) arranged outside the resonator behind a second resonator mirror (14) to separate the pump radiation (22) from the radiation (24) generated in the optical parametric oscillator.
    Type: Grant
    Filed: April 2, 1996
    Date of Patent: August 26, 1997
    Assignee: Lambda Physik Gesellschaft zur Herstellung Von Lasern mbH
    Inventors: Uwe Stamm, Peter Lokai, Vadim Berger, Stefan Borneis
  • Patent number: 5659419
    Abstract: A tunable narrowband optical parametrical oscillator (OPO) is excited in pulsed fashion to generate tunable narrowband radiation. A wavelength selective means (T, G) disposed outside the resonant cavity (M3, M4) of the optical parametrical oscillator reduces the bandwidth of the OPO radiation generated. A pumping pulse is divided by a beam splitter (DM1) into at least two partial pulses, and the delay between the two partial pulses is adjusted by means of a delay distance (D) in such a mannner that the first partial pulse will pump the crystal of the optical parametrical oscillator, part of the OPO radiation thus generated passing through the wavelength selective means which is arranged outside the resonant cavity, being coupled back into the resonant cavity, and passing through the crystal (C) once again when the second partial pulse (2) pumps the crystal (C).
    Type: Grant
    Filed: July 11, 1995
    Date of Patent: August 19, 1997
    Assignee: Lambda Physik Gesellschaft Zur Herstellung Von Lasern mbH
    Inventors: Peter Lokai, Uwe Stamm
  • Patent number: 5559816
    Abstract: A narrow-band laser apparatus comprises an optical resonator including first and second reflectors for reflecting radiation, a laser medium for amplifying radiation in said resonator and an etalon for selecting a given wavelength component from said radiation. A polarizing beam splitter is provided for linearly polarizing said radiation and also for acting as an output coupler. In order to obtain very narrow bandwidth radiation of high intensity, a Faraday rotator is provided for rotating the plane of polarization while maintaining the linear polarization thereby allowing a second wavelength selection element (such as a grating) to be efficiently employed to further narrow the output of the laser.
    Type: Grant
    Filed: May 30, 1995
    Date of Patent: September 24, 1996
    Assignee: Lambda Physik Gesellschaft Zur Herstellung Von Lasern mbH
    Inventors: Dirk Basting, Jurgen Kleinschmidt
  • Patent number: 5559815
    Abstract: A pulsed laser comprises an oscillator (10), a laser medium (14), a wavelength selective member (12) for tuning the wavelength of a beam pulse (18) emitted by the oscillator, and means for pulsed excitation of the laser medium (14). The laser medium (14) is excited at least twice at consecutive times to generate a single beam pulse (18).
    Type: Grant
    Filed: May 9, 1995
    Date of Patent: September 24, 1996
    Assignee: Lambda Physik Gesellschaft Zur Herstellung Von Lasern mbH
    Inventors: Vadim Berger, Jurgen Kleinschmidt, Uwe Stamm, Wolfgang Zschoke
  • Patent number: 5430752
    Abstract: An apparatus for purifying laser gas, in particular for excimer and F.sub.2 lasers, employs liquid nitrogen (12) for freezing impurities out of the laser gas, the freeze-out temperature being set by means of the pressure above the surface (14) of the liqid nitrogen (12).
    Type: Grant
    Filed: June 9, 1994
    Date of Patent: July 4, 1995
    Assignee: Lambda Physik Gesellschaft zur Herstellung von Lasern MbH
    Inventors: Dirk Basting, Gerd Steinfuhrer, Frank Voss
  • Patent number: 5347532
    Abstract: Laser comprising at least one anode (1) and one cathode (2) for preionization and main discharge, the anode (1) and the cathode (2) having different standard potentials. The laser is distinguished by high reliability and long life. After several hours of operation, practically no material erosion at all is found at the electrodes.
    Type: Grant
    Filed: December 4, 1992
    Date of Patent: September 13, 1994
    Assignee: Lambda Physik Gesellschaft Zur Herstellung Von Lasern mbH
    Inventors: Ulrich Rebhan, Frank Voss
  • Patent number: 5220574
    Abstract: An excimer laser having a chamber (10) in which a gas-discharge is performed with participation of hydrogen-chloride comprises means with which the hydrogen chloride is formed by hydrolysis.
    Type: Grant
    Filed: November 19, 1991
    Date of Patent: June 15, 1993
    Assignee: Lambda Physik Gesellschaft zur Herstellung von Lasern mbH
    Inventors: Frank Voss, Dirk Basting, A. Meller
  • Patent number: 5142545
    Abstract: Dye for a dye laser according to the general formula: ##STR1## wherein: X.sup.- is an acid anion andHet is the non-metal atoms necessary to complete a heterocyclic ring,n=1 - 3.
    Type: Grant
    Filed: June 18, 1991
    Date of Patent: August 25, 1992
    Assignee: Lambda Physik Gesellschaft Zur Herstellung Von Lasern mbH
    Inventor: Gerd Spiecker
  • Patent number: 5140600
    Abstract: A method of controlling the total energy amount of a plurality of laser pulses in which the accumulation of the energy amounts of the individual pulses is measured with an energy measuring device and the laser pulses are interrupted when a dose desired value of the accumulated energy amounts is reached, provides that for increasing the accuracy of the energy dose achieved several laser pulses before reaching the dose desired value the energy amount of the individual laser pulses is reduced.
    Type: Grant
    Filed: April 4, 1991
    Date of Patent: August 18, 1992
    Assignee: Lambda Physik Gesellschaft zur Herstellung von Lasern mbH
    Inventor: Ulrich Rebhan
  • Patent number: 5136605
    Abstract: An apparatus for purifying laser gas, in particular for excimer and F.sub.2 lasers, employs liquid nitrogen (12) for freezing impurities out of the laser gas, the freeze-out temperature being set by means of the pressure above the surface (14) of the liquid nitrogen (12).
    Type: Grant
    Filed: March 15, 1991
    Date of Patent: August 4, 1992
    Assignee: Lambda Physik Gesellschaft zur Herstellung von Lasern mbH
    Inventors: Dirk Basting, Gerd Steinfuhrer, Frank Voss