Patents Assigned to Lambda Physik Gesellschaft zur Herstellung von Lasern mbH
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Publication number: 20010000606Abstract: A device for flushing the optical path of a UV laser beam has a casing (18) with which the optical path is separated from the external atmosphere (26). In order to maximize the life of the optical components (24, 26) in the optical path, a noble gas, in particular argon, is used for flushing the optical path.Type: ApplicationFiled: December 1, 2000Publication date: May 3, 2001Applicant: LAMBDA PHYSIK GESELLSCHAFT ZUR HERSTELLUNG VON LASERN MBHInventors: Andreas Gortler, Andreas Haupt
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Patent number: 6038240Abstract: Even in the case of variations in the pulse repetition frequency, a solid-state laser generates laser pulses with constant beam characteristics in such a way that when the pulse repetition frequency of the laser pulses is varied the pulse duty factor of the pumping radiation is kept constant and Q switching is triggered in each case at a prescribed period after the start of the pumping pulse.Type: GrantFiled: January 16, 1998Date of Patent: March 14, 2000Assignee: Lambda Physik Gesellschaft zur Herstellung von Lasern mbHInventors: Nils Deutsch, Thomas Schroder, Uwe Stamm, Wolfgang Zschocke
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Patent number: 5838701Abstract: A Q-switched solid-state laser has a narrow-band laser diode (18) whose narrow-band output radiation serves as seed radiation for exciting a solid (14), with the result that only a single wavelength-stable longitudinal mode oscillates in the resonator (10, 12) of the solid-state laser and corresponding radiation (16) is emitted.Type: GrantFiled: February 20, 1997Date of Patent: November 17, 1998Assignee: Lambda Physik Gesellschaft Zur Herstellung Von Lasern mbHInventors: Nils Deutsch, Thomas Schroder, Uwe Stamm, Wolfgang Zschocke
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Patent number: 5761236Abstract: A laser, especially an excimer laser, is designed to generate narrow-band radiation and comprises a laser resonator, including two reflecting elements (12, 14) between which there is disposed a laser active medium (10), and further comprises a group of several refractive dispersive elements (32, 34) arranged in the laser beam path and each deflecting, incident light at an angle (.gamma..sub.a, .gamma..sub.b) which is specific of the wavelength of the incident light. It is provided to reduce variations of the emission wavelength which are temperature responsive and time dependent during burst operation by giving at least one of the refractive dispersive elements (32) a refractive index which increases as the temperature goes up and at least one of these elements (34) a refractive index which drops as the temperature rises.Type: GrantFiled: July 18, 1996Date of Patent: June 2, 1998Assignee: Lambda Physik Gesellschaft zur Herstellung Von Lasern mbHInventors: Jurgen Kleinschmidt, Peter Heist
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Patent number: 5729565Abstract: An electrode for a gas discharge laser. Electrodes which consist, at least in part, of zirconium are suggested for use in gas discharge lasers containing fluorine.Type: GrantFiled: November 7, 1996Date of Patent: March 17, 1998Assignee: Lambda Physik Gesellschaft zur Herstellung von Lasern MBHInventors: Anton Meller, Frank Voss
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Patent number: 5663973Abstract: A tunable narrowband source of a coherent radiation, comprisinga first optical parametric oscillator (OPO1) which includes at least one first optical parametric amplifier medium (K.sub.1) in a resonator (18, 20; 20, 34) or an optical parametric generator;at least one second optical parametric oscillator (OPO2) which includes at least one second optical parametric amplifier medium (K.sub.Type: GrantFiled: June 10, 1996Date of Patent: September 2, 1997Assignee: Lambda Physik Gesellschaft zur Herstellung von Lasern mbHInventors: Uwe Stamm, Ingo Klaft, Vadim Berger, Stefan Borneis, Peter Lokai
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Patent number: 5661595Abstract: A tunable, optical, parametric oscillator including at least one non-linear optical crystal (10) comprises a first deflector mirror (18) arranged inside the resonator between the resonator mirror (12) and the crystal (10) to couple in the pump radiation (16) as well as a second deflector mirror (20) arranged outside the resonator behind a second resonator mirror (14) to separate the pump radiation (22) from the radiation (24) generated in the optical parametric oscillator.Type: GrantFiled: April 2, 1996Date of Patent: August 26, 1997Assignee: Lambda Physik Gesellschaft zur Herstellung Von Lasern mbHInventors: Uwe Stamm, Peter Lokai, Vadim Berger, Stefan Borneis
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Patent number: 5659419Abstract: A tunable narrowband optical parametrical oscillator (OPO) is excited in pulsed fashion to generate tunable narrowband radiation. A wavelength selective means (T, G) disposed outside the resonant cavity (M3, M4) of the optical parametrical oscillator reduces the bandwidth of the OPO radiation generated. A pumping pulse is divided by a beam splitter (DM1) into at least two partial pulses, and the delay between the two partial pulses is adjusted by means of a delay distance (D) in such a mannner that the first partial pulse will pump the crystal of the optical parametrical oscillator, part of the OPO radiation thus generated passing through the wavelength selective means which is arranged outside the resonant cavity, being coupled back into the resonant cavity, and passing through the crystal (C) once again when the second partial pulse (2) pumps the crystal (C).Type: GrantFiled: July 11, 1995Date of Patent: August 19, 1997Assignee: Lambda Physik Gesellschaft Zur Herstellung Von Lasern mbHInventors: Peter Lokai, Uwe Stamm
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Patent number: 5559816Abstract: A narrow-band laser apparatus comprises an optical resonator including first and second reflectors for reflecting radiation, a laser medium for amplifying radiation in said resonator and an etalon for selecting a given wavelength component from said radiation. A polarizing beam splitter is provided for linearly polarizing said radiation and also for acting as an output coupler. In order to obtain very narrow bandwidth radiation of high intensity, a Faraday rotator is provided for rotating the plane of polarization while maintaining the linear polarization thereby allowing a second wavelength selection element (such as a grating) to be efficiently employed to further narrow the output of the laser.Type: GrantFiled: May 30, 1995Date of Patent: September 24, 1996Assignee: Lambda Physik Gesellschaft Zur Herstellung Von Lasern mbHInventors: Dirk Basting, Jurgen Kleinschmidt
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Patent number: 5559815Abstract: A pulsed laser comprises an oscillator (10), a laser medium (14), a wavelength selective member (12) for tuning the wavelength of a beam pulse (18) emitted by the oscillator, and means for pulsed excitation of the laser medium (14). The laser medium (14) is excited at least twice at consecutive times to generate a single beam pulse (18).Type: GrantFiled: May 9, 1995Date of Patent: September 24, 1996Assignee: Lambda Physik Gesellschaft Zur Herstellung Von Lasern mbHInventors: Vadim Berger, Jurgen Kleinschmidt, Uwe Stamm, Wolfgang Zschoke
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Patent number: 5430752Abstract: An apparatus for purifying laser gas, in particular for excimer and F.sub.2 lasers, employs liquid nitrogen (12) for freezing impurities out of the laser gas, the freeze-out temperature being set by means of the pressure above the surface (14) of the liqid nitrogen (12).Type: GrantFiled: June 9, 1994Date of Patent: July 4, 1995Assignee: Lambda Physik Gesellschaft zur Herstellung von Lasern MbHInventors: Dirk Basting, Gerd Steinfuhrer, Frank Voss
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Patent number: 5347532Abstract: Laser comprising at least one anode (1) and one cathode (2) for preionization and main discharge, the anode (1) and the cathode (2) having different standard potentials. The laser is distinguished by high reliability and long life. After several hours of operation, practically no material erosion at all is found at the electrodes.Type: GrantFiled: December 4, 1992Date of Patent: September 13, 1994Assignee: Lambda Physik Gesellschaft Zur Herstellung Von Lasern mbHInventors: Ulrich Rebhan, Frank Voss
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Excimer laser with hydrogen chloride and method for producing hydrogen chloride for an excimer laser
Patent number: 5220574Abstract: An excimer laser having a chamber (10) in which a gas-discharge is performed with participation of hydrogen-chloride comprises means with which the hydrogen chloride is formed by hydrolysis.Type: GrantFiled: November 19, 1991Date of Patent: June 15, 1993Assignee: Lambda Physik Gesellschaft zur Herstellung von Lasern mbHInventors: Frank Voss, Dirk Basting, A. Meller -
Patent number: 5142545Abstract: Dye for a dye laser according to the general formula: ##STR1## wherein: X.sup.- is an acid anion andHet is the non-metal atoms necessary to complete a heterocyclic ring,n=1 - 3.Type: GrantFiled: June 18, 1991Date of Patent: August 25, 1992Assignee: Lambda Physik Gesellschaft Zur Herstellung Von Lasern mbHInventor: Gerd Spiecker
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Patent number: 5140600Abstract: A method of controlling the total energy amount of a plurality of laser pulses in which the accumulation of the energy amounts of the individual pulses is measured with an energy measuring device and the laser pulses are interrupted when a dose desired value of the accumulated energy amounts is reached, provides that for increasing the accuracy of the energy dose achieved several laser pulses before reaching the dose desired value the energy amount of the individual laser pulses is reduced.Type: GrantFiled: April 4, 1991Date of Patent: August 18, 1992Assignee: Lambda Physik Gesellschaft zur Herstellung von Lasern mbHInventor: Ulrich Rebhan
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Patent number: 5136605Abstract: An apparatus for purifying laser gas, in particular for excimer and F.sub.2 lasers, employs liquid nitrogen (12) for freezing impurities out of the laser gas, the freeze-out temperature being set by means of the pressure above the surface (14) of the liquid nitrogen (12).Type: GrantFiled: March 15, 1991Date of Patent: August 4, 1992Assignee: Lambda Physik Gesellschaft zur Herstellung von Lasern mbHInventors: Dirk Basting, Gerd Steinfuhrer, Frank Voss