Patents Assigned to Laser Imaging Systems GmbH & Co. KG
  • Patent number: 9523873
    Abstract: A direct imaging system comprises an illumination unit comprising a plurality of light sources, the plurality of light sources configured to emit a plurality of beams, an optical system for forming the plurality of beams to be aligned in position or angle, an acoustic optical modulator positioned to receive the plurality of beams aligned in one of position or angle and to consecutively diffract different portions of the plurality of beams as an acoustic wave propagates in an acoustic direction, and a scanning element adapted to scan an exposure plane with the plurality of beams modulated by the acoustic optical modulator at a scanning velocity, wherein the scanning velocity is selected to incoherently unite the different portions of the plurality of beams into a single exposure spot.
    Type: Grant
    Filed: January 23, 2015
    Date of Patent: December 20, 2016
    Assignees: Orbotech Ltd., Laser Imaging Systems GmbH & Co. KG
    Inventors: Stefan Heinemann, Wolfgang Retschke, Holger Wagner, Jonas Burghoff, Abraham Gross
  • Publication number: 20150168749
    Abstract: A direct imaging system comprises an illumination unit comprising a plurality of light sources, the plurality of light sources configured to emit a plurality of beams, an optical system for forming the plurality of beams to be aligned in position or angle, an acoustic optical modulator positioned to receive the plurality of beams aligned in one of position or angle and to consecutively diffract different portions of the plurality of beams as an acoustic wave propagates in an acoustic direction, and a scanning element adapted to scan an exposure plane with the plurality of beams modulated by the acoustic optical modulator at a scanning velocity, wherein the scanning velocity is selected to incoherently unite the different portions of the plurality of beams into a single exposure spot.
    Type: Application
    Filed: January 23, 2015
    Publication date: June 18, 2015
    Applicants: LASER IMAGING SYSTEMS GMBH & CO. KG, ORBOTECH LTD.
    Inventors: Stefan HEINEMANN, Wolfgang RETSCHKE, Holger WAGNER, Jonas BURGHOFF, Abraham GROSS
  • Patent number: 8964274
    Abstract: A direct imaging system comprises an illumination unit comprising a plurality of light sources, the plurality of light sources configured to emit a plurality of beams, an optical system for forming the plurality of beams to be aligned in position or angle, an acoustic optical modulator positioned to receive the plurality of beams aligned in one of position or angle and to consecutively diffract different portions of the plurality of beams as an acoustic wave propagates in an acoustic direction, and a scanning element adapted to scan an exposure plane with the plurality of beams modulated by the acoustic optical modulator at a scanning velocity, wherein the scanning velocity is selected to incoherently unite the different portions of the plurality of beams into a single exposure spot.
    Type: Grant
    Filed: August 1, 2013
    Date of Patent: February 24, 2015
    Assignees: Orbotech Ltd., Laser Imaging Systems GmbH & Co. KG
    Inventors: Stefan Heinemann, Wolfgang Retschke, Holger Wagner, Jonas Burghoff, Abraham Gross
  • Publication number: 20130321898
    Abstract: A direct imaging system comprises an illumination unit comprising a plurality of light sources, the plurality of light sources configured to emit a plurality of beams, an optical system for forming the plurality of beams to be aligned in position or angle, an acoustic optical modulator positioned to receive the plurality of beams aligned in one of position or angle and to consecutively diffract different portions of the plurality of beams as an acoustic wave propagates in an acoustic direction, and a scanning element adapted to scan an exposure plane with the plurality of beams modulated by the acoustic optical modulator at a scanning velocity, wherein the scanning velocity is selected to incoherently unite the different portions of the plurality of beams into a single exposure spot.
    Type: Application
    Filed: August 1, 2013
    Publication date: December 5, 2013
    Applicants: Laser Imaging Systems GmbH & Co. KG, Orbotech Ltd.
    Inventors: Stefan HEINEMANN, Wolfgang RETSCHKE, Holger WAGNER, Jonas BURGHOFF, Abraham GROSS
  • Patent number: 8531751
    Abstract: A direct imaging system comprises an illumination unit comprising a plurality of light sources, the plurality of light sources configured to emit a plurality of beams, an optical system for forming the plurality of beams to be aligned in position or angle, an acoustic optical modulator positioned to receive the plurality of beams aligned in one of position or angle and to consecutively diffract different portions of the plurality of beams as an acoustic wave propagates in an acoustic direction, and a scanning element adapted to scan an exposure plane with the plurality of beams modulated by the acoustic optical modulator at a scanning velocity, wherein the scanning velocity is selected to incoherently unite the different portions of the plurality of beams into a single exposure spot.
    Type: Grant
    Filed: August 19, 2011
    Date of Patent: September 10, 2013
    Assignees: Orbotech Ltd., Laser Imaging Systems GmbH & Co. KG
    Inventors: Stefan Heinemann, Wolfgang Retschke, Holger Wagner, Jonas Burghoff, Abraham Gross
  • Publication number: 20130044360
    Abstract: A direct imaging system comprises an illumination unit comprising a plurality of light sources, the plurality of light sources configured to emit a plurality of beams, an optical system for forming the plurality of beams to be aligned in position or angle, an acoustic optical modulator positioned to receive the plurality of beams aligned in one of position or angle and to consecutively diffract different portions of the plurality of beams as an acoustic wave propagates in an acoustic direction, and a scanning element adapted to scan an exposure plane with the plurality of beams modulated by the acoustic optical modulator at a scanning velocity, wherein the scanning velocity is selected to incoherently unite the different portions of the plurality of beams into a single exposure spot.
    Type: Application
    Filed: August 19, 2011
    Publication date: February 21, 2013
    Applicants: LASER IMAGING SYSTEMS GMBH & CO. KG, ORBOTECH LTD.
    Inventors: Stefan HEINEMANN, Wolfgang RETSCHKE, Holger WAGNER, Jonas BURGHOFF, Abraham GROSS
  • Patent number: 7259777
    Abstract: Apparatus for holding flat plates of varying sizes, including a base section having a flat surface and including plurality of interconnected channels formed on the surface thereof; at least one port connecting to the channels; a vacuum source connected to the at least one port; and an intermediate plate covering substantially all of the channels and having a multiplicity of holes formed therethrough, the holes being arranged to be covered by a flat plate that is to be held to the flat surface.
    Type: Grant
    Filed: March 3, 2006
    Date of Patent: August 21, 2007
    Assignee: Laser Imaging Systems GmbH & Co. KG
    Inventors: Wolfgang Retschke, Wolfgang Senf, Steffen Rucker, Uwe Klowsky, Udo Battig, Ulrich Baumann
  • Publication number: 20060132590
    Abstract: Apparatus for holding flat plates of varying sizes, including a base section having a flat surface and including plurality of interconnected channels formed on the surface thereof; at least one port connecting to the channels; a vacuum source connected to the at least one port; and an intermediate plate covering substantially all of the channels and having a multiplicity of holes formed therethrough, the holes being arranged to be covered by a flat plate that is to be held to the flat surface.
    Type: Application
    Filed: March 3, 2006
    Publication date: June 22, 2006
    Applicant: LASER IMAGING SYSTEMS GMBH & CO. KG
    Inventors: Wolfgang RETSCHKE, Wolfgang SENF, Steffen RUCKER, Uwe KLOWSKY, Udo BATTIG, Ulrich BAUMANN
  • Patent number: 7046266
    Abstract: A method of scanning for writing a pattern on a surface, including providing a scanning beam comprised of a plurality of independently addressable sub-beams, scanning the surface with the scanning beam a plurality of times, the sub-beams scanning the surface side-by-side in the cross-scan direction, each sub-beam being modulated to reflect information to be written, and overlapping the beams in successive scans in the cross scan direction such that all written areas of the surface are written on during at least two scans.
    Type: Grant
    Filed: March 15, 1999
    Date of Patent: May 16, 2006
    Assignee: Laser Imaging Systems GmbH & Co. KG
    Inventors: Wolfgang Retschke, Wolfgang Senf, Steffen Rücker, Uwe Klowsky, Udo Battig, Ulrich Baumann
  • Patent number: 6770866
    Abstract: Apparatus for scanning a beam across a surface including a scanner scanning a pulsed laser beam across a surface and a position indicator receiving an input from the pulsed laser beam at a plurality of locations across the surface, and outputting position indications indicating a position of said pulsed laser beam along said surface. The position indications are used to modulate data in apparatus for exposing patterns on surfaces, for example electrical circuit patterns on photosensitized surfaces. One use of such apparatus is the manufacture of electrical circuits.
    Type: Grant
    Filed: January 3, 2002
    Date of Patent: August 3, 2004
    Assignee: Laser Imaging Systems GmbH & Co. KG
    Inventors: Wolfgang Retschke, Wolfgang Senf, Yigal Katzir