Abstract: The optical level control device independently controls the intensities of two beams having different wavelengths that are emitted from a laser oscillator, and the optical level control device includes a wavelength-dependent wavelength plate and a polarization beam splitter. The wavelength-dependent wavelength plate functions as a half-wave plate with respect to the first light wave and as a full-wave plate with respect to the second light wave. Only the rotation angle of the polarization beam splitter about the optical axis is adjusted to set the intensity of the second light wave transmitted rectilinearly through the polarization beam splitter. The polarization beam splitter is then fixed at the adjusted angle, and the rotation angle of the wavelength plate about the optical axis is adjusted to set the intensity of the first light wave.

Abstract: The optical level control device independently controls the intensities of two beams having different wavelengths that are emitted from a laser oscillator, and the optical level control device includes a wavelength-dependent wavelength plate and a polarization beam splitter. The wavelength-dependent wavelength plate functions as a half-wave plate with respect to the first light wave and as a full-wave plate with respect to the second light wave. Only the rotation angle of the polarization beam splitter about the optical axis is adjusted to set the intensity of the second light wave transmitted rectilinearly through the polarization beam splitter. The polarization beam splitter is then fixed at the adjusted angle, and the rotation angle of the wavelength plate about the optical axis is adjusted to set the intensity of the first light wave.

Abstract: The optical level control device independently controls the intensities of two beams having different wavelengths that are emitted from a laser oscillator, and the optical level control device comprises a wavelength-dependent wavelength plate and a polarization beam splitter. The wavelength-dependent wavelength plate functions as a half-wave plate with respect to the first light wave and as a full-wave plate with respect to the second light wave. Only the rotation angle of the polarization beam splitter about the optical axis is adjusted to set the intensity of the second light wave transmitted rectilinearly through the polarization beam splitter. The polarization beam splitter is then fixed at the adjusted angle, and the rotation angle of the wavelength plate about the optical axis is adjusted to set the intensity of the first light wave.

Abstract: A laser annealing apparatus comprises a laser oscillator having a Q switching action, one or a plurality of partially reflective mirrors for split a laser beam emitted from the laser oscillator into a plurality of laser beams, a plurality of optical fibers which respectively transmit the plurality of laser beams split by the partially reflective mirrors, and whose respective emission ends are arranged linearly in one direction, a first optical system for synthesizing and homogenizing the plurality of laser beams emitted from the optical fibers, and a second optical system for focusing the laser beam emitted from the first optical system on the work piece surface as a rectangular laser beam whose beam shape is long in the lateral direction and short in the longitudinal direction.

Abstract: A linear motor table is provided in a lens switching apparatus of a laser repair apparatus. The linear motor table is fixed with respect to a table and a laser oscillator and moves a lens holder in a horizontal direction. Six objective lenses with magnifications different from each other are provided and are held in a lens holder in a row such that the optical axes thereof are parallel to each other. The objective lens placed in the light path of laser light is switched by the linear motor table moving the lens holder. Because of this, a member, such as a lens, can be positioned with high accuracy and if positional shifting occurs, it can be quickly cancelled using a simple mechanism.

Abstract: Two laser media are disposed at equal intervals between a first flat mirror, which is a resonator mirror comprising a resonator, and a second flat mirror for separating laser light that transmits second-harmonic laser light and reflects fundamental laser light toward a laser light incident plane; and a dielectric multilayer film is formed on the second flat mirror for separating the laser light. A third flat mirror, which is a resonator mirror, is disposed so as to face a direction 90° to the incident direction of the fundamental laser light in the second flat mirror. A first lens, a nonlinear optical crystal for converting fundamental laser light into a second-harmonic laser light, and a second lens are disposed in sequence in a single row at intervals that are equal to the focal distances f of the first and second lenses between the second and third flat mirrors.

Abstract: A wiring repair apparatus includes an XY stage on which a substrate is placed, a laser source unit disposed above the XY stage, first and second gas windows disposed between the laser source unit and the XY stage, and first and second CVD gas units. The laser source unit emits a laser beam to a part of the substrate to be repaired. This laser beam passes through either the first or second gas window. The first CVD gas unit supplies an Al source gas (DMAH gas) to the first gas window while the second CVD gas unit supplies a Cr source gas (Cr(CO)6 gas) to the second gas window.

Abstract: A laser annealing apparatus comprises a laser oscillator having a Q switching action, one or a plurality of partially reflective mirrors for split a laser beam emitted from the laser oscillator into a plurality of laser beams, a plurality of optical fibers which respectively transmit the plurality of laser beams split by the partially reflective mirrors, and whose respective emission ends are arranged linearly in one direction, a first optical system for synthesizing and homogenizing the plurality of laser beams emitted from the optical fibers, and a second optical system for focusing the laser beam emitted from the first optical system on the work piece surface as a rectangular laser beam whose beam shape is long in the lateral direction and short in the longitudinal direction.

Abstract: Nine vibration isolating mounts are disposed on a pedestal, and a granite plate is placed thereon. A pair of guide bases are disposed on the granite plate, and disposed thereon are a pair of posts made of CFRP for movements in a Y-direction relative to the granite plate. A beam made of CFRP is extended between the pair of posts. Further, a movement base is disposed for movement in an X-direction relative to the beam, and a laser optical unit is mounted on the movement base.

Abstract: A conventional method for a solid-state laser device that obtains a laser beam output of a high quality at a high output using a laser diode as a pumping light source has a problem that the costs are increased and the fabrication becomes complicated due to an increasing number of components, such as a diffusing reflection mirror, a condenser lens, and a holding mechanism and a cooling mechanism thereof. Coating with a antireflection coating to reduce a transmission loss of laser diode light, and coating with a high reflection coating to reflect the laser diode light are provided alternately on the outer surface of a cooling tube. Also, an irradiation direction of the laser diode is not directed to the center of the laser rod, but is given with a certain angle to be positively tilted. This configuration makes it possible to eliminate the above problem.

Abstract: A laser CVD device capable of tightening adhesion of a film formed by laser CVD to a film formation face of a substrate and preventing cracks from occurring in the film itself is to be provided. The device comprises a plasma pretreating unit for turning pretreating gas into a plasma state by arc discharge and for supplying the plasma sate gas to the film formation face; and a film forming unit having means for sealing film forming gas while being isolated from an external atmosphere, means for radiating a laser beam to the film forming gas, wherein the film is formed over the film formation face of the substrate.

Abstract: Submount substrates are connected to both sides of a laser diode via hard solders. The lower submount substrate and a heat sink are connected together by a soft solder. The heat sink and a presser electrode are fixed with a predetermined gap therebetween via an insulating spacer. A coil electrode is fitted in a V-shaped groove of the presser electrode. As the coil electrode is deformed slightly elastically, the coil electrode is pressed against the upper submount substrate.

Abstract: Two laser media are disposed at equal intervals between a first flat mirror, which is a resonator mirror comprising a resonator, and a second flat mirror for separating laser light that transmits second-harmonic laser light and reflects fundamental laser light toward a laser light incident plane; and a dielectric multilayer film is formed on the second flat mirror for separating the laser light. A third flat mirror, which is a resonator mirror, is disposed so as to face a direction 90° to the incident direction of the fundamental laser light in the second flat mirror. A first lens, a nonlinear optical crystal for converting fundamental laser light into a second-harmonic laser light, and a second lens are disposed in sequence in a single row at intervals that are equal to the focal distances f of the first and second lenses between the second and third flat mirrors.

Abstract: An optical packet header identifier having a simplified configuration and being superior in reliability, stability, and economical efficiency, an optical router incorporating the identifier therein, and a routing method using the optical router are provided. The optical packet header identifier includes an optical waveguide, optical focusing elements, and a photo receiver. Tilted gratings for diffracting an incident optical beam and emitting the beams as diffracted optical beams to the outside of the waveguide are formed within the optical waveguide. The tilted gratings are not formed uniformly in a longitudinal direction of a core of the optical waveguide, but are arranged at intervals. The length of a portion containing a set of gratings and the length of a portion containing no gratings can be defined in increments of length “L”. “L” equals to the spatial length which 1 bit in an optical signal occupies.

Abstract: In a laser machining method for removing remaining defects on a photomask, there has been problems to be resolved that damage is formed at the portion of the substrate where the defect has been removed, thus resulting in degraded quality of machining. In a laser machining method for removing remaining defects on a photomask by a method of laser machining, the remaining defects are removed by using a configuration in which irradiation with a laser beam is performed from below with a to-be-machined surface directed downward, and irradiation with a laser beam in an atmosphere containing a halogenated hydrocarbon gas (as an example, ethyl iodide).

Abstract: A covering member having a valve encloses a flexible hose to form a double pipe. Gas supply pipe fittings are attached to respective ends of the double pipe to form a hermetic space between the flexible hose and covering member. The covering member also has a pressure-measuring device to which a decision unit equipped with an alarm device is connected. The same gas or liquid as the one flowing through the flexible hose is introduced to the hermetic space from the valve provided in the covering member, and sealed in the hermetic space by closing the valve. The pressure in the hermetic space is set so as to be higher than the pressure produced in the flexible hose when the gas or liquid is flowing. The pressure-measuring device measures the pressure in the hermetic space while the gas or liquid flows in the flexible hose, and the decision unit compares the measured value with a reference value.

Abstract: An optical packet header identifier having a simplified configuration and being superior in reliability, stability, and economical efficiency, an optical router incorporating the identifier therein, and a routing method using the optical router are provided. The optical packet header identifier includes an optical waveguide, optical focusing elements, and a photo receiver. Tilted gratings for diffracting an incident optical beam and emitting the beams as diffracted optical beams to the outside of the waveguide are formed within the optical waveguide. The tilted gratings are not formed uniformly in a longitudinal direction of a core of the optical waveguide, but are arranged at intervals. The length of a portion containing a set of gratings and the length of a portion containing no gratings can be defined in increments of length “L”. “L” equals to the spatial length which 1 bit in an optical signal occupies.

Abstract: An optical packet header identifier having a simplified configuration and being superior in reliability, stability, and economical efficiency, an optical router incorporating the identifier therein, and a routing method using the optical router are provided. The optical packet header identifier includes an optical waveguide, optical focusing elements, and a photo receiver. Tilted gratings for diffracting an incident optical beam and emitting the beams as diffracted optical beams to the outside of the waveguide are formed within the optical waveguide. The tilted gratings are not formed uniformly in a longitudinal direction of a core of the optical waveguide, but are arranged at intervals. The length of a portion containing a set of gratings and the length of a portion containing no gratings can be defined in increments of length “L”. “L” equals to the spatial length which 1 bit in an optical signal occupies.

Abstract: In order to correct a white defect on a surface of a substrate, the substrate is held with the surface facing downward, laser light is upward irradiated at the defect on the surface in material gas, and as a result, the white defect is covered with film.

Abstract: A method for repairing a pattern by using a laser and a laser-based pattern repair apparatus are provided which are capable of reducing splashes, rolling-up, and damage to a glass substrate to a minimum in pattern defects repairing processing by removing a thin metal layer such as a chromium layer. A part of a string of pulses obtained by slicing, using an optical shutter, pulses from laser light having a pulse width of 10 ps to 300 ps emitted from a Q-switched mode-locked pulse laser is used to produce multi-pulses which are divided into two portions in terms of time base correction using an optical delaying unit.