Abstract: Longitudinal and shear ultrasonic waves are generated inside a material by irradiating a laser beam onto a first surface, e.g., incident surface, of the material. An ultrasonic longitudinal wave and a mode converted wave reflected by a second surface, e.g., a bottom surface, of the material are detected, and times of flight of the ultrasonic longitudinal wave and the mode converted wave are measured. A thickness of the material is measured based on the times of flight and a correlation, obtained in advance, between longitudinal and shear wave velocities of the material and temperature of the material.

Abstract: Longitudinal and shear ultrasonic waves are generated inside a material by irradiating a laser beam onto a first surface, e.g., incident surface, of the material. An ultrasonic longitudinal wave and a mode converted wave reflected by a second surface, e.g., a bottom surface, of the material are detected, and times of flight of the ultrasonic longitudinal wave and the mode converted wave are measured. A thickness of the material is measured based on the times of flight and a correlation, obtained in advance, between longitudinal and shear wave velocities of the material and temperature of the material.

Abstract: A laser-based technique to determine glass thickness employs a pulsed laser to induce an ultrasonic wave between the surfaces of a region of glass, causing the surfaces to move in and out at a characteristic frequency. The surface motion is monitored to determine the characteristic frequency, which is proportional to the thickness of the glass in the region of the ultrasonic wave. The pulsed laser produces a short duration pulse that illuminates a surface of the glass, which is absorbed within the glass to cause a rapid thermal expansion that generates the ultrasonic wave. The surface motion induced by the ultrasonic wave is preferably detected with a laser interferometer system, the output of which is analyzed to determine the surface motion's characteristic frequency.

Abstract: Single-beam laser apparatus for measuring surface velocity at acoustic frequencies and surface displacement at ultrasonic frequencies includes a source laser and optics for directing a single laser beam at normal incidence to a surface. A photo EMF detector and optics are provided for directing surface reflected laser beam at the photo EMF detector in order to provide outputs therefrom which are directly proportional to all three orthogonal components surface velocity or displacement.