Patents Assigned to LayTec Gesellschaft fur in-situ und nano-Sensork mbH - Justia Patents Search

Patents Assigned to LayTec Gesellschaft fur in-situ und nano-Sensork mbH

Method for measuring characteristics, especially the temperature of a multi-layer material while the layers are being built up

Publication number: 20020113971

Abstract: The invention relates to a method for measuring characteristics, especially the temperature of a multi-layer material during the build-up of the layers, especially of a stratified semiconductor system during epitaxy under constant process conditions.

Type: Application

Filed: November 30, 2001

Publication date: August 22, 2002

Applicant: LayTec Gesellschaft fur in-situ und nano-Sensork mbH

Inventors: Jorg-Thomas Zettler, Kolja Haberland