Patents Assigned to Le Parc Technologique de Fontaines
  • Multilayer structure used especially as a material of high relative permittivity
    Publication number: 20030124394
    Abstract: Multilayer structure, used especially as a material of high relative permittivity, characterized in that it comprises a plurality of separate layers, each having a thickness of less than 500 Å, and based on hafnium dioxide (HfO2), zirconium dioxide (ZrO2) and alumina (Al2O3). In practice, the hafnium dioxide, zirconium dioxide and alumina layers form alloys of formula HfxZrAlyOz. Advantageously, the stoichiometry of the HfxZrAlyOz alloys varies from one layer to another.
    Type: Application
    Filed: December 24, 2002
    Publication date: July 3, 2003
    Applicant: Le Parc Technologique de Fontaines
    Inventor: Lionel Girardie