Abstract: A barrier discharge device (4a, 4b, 4c) installed in a vacuum chamber (1) consists essentially of at least two facing electrodes (20, 22); a dielectric (22) situated between the electrodes (20, 22) and in the immediate proximity of one of these electrodes (20); and a power source (26), which is connected electrically to the electrodes (20, 22). The plasma particles and UV radiation generated during the electrical discharge between the electrodes (20, 22) pass through the electrode (22), which is permeable to UV radiation and plasma particles, and thus emerge from the discharge space. On the surfaces (5a, 5b), the UV radiation induces a photochemical cleaning process, and the impinging plasma particles induce a plasma-chemical cleaning process. The cleaning process is essentially independent of pressure and can be used at pressures of up to 10 bars, which means that the cleaning process can be operated in particular during the time in which the vacuum chamber (1) is being pumped out.

Abstract: A treatment chamber (1) evacuable by vacuum pumps (13,13') has a mounting (26,26', . . .) bearing the hollow body (4) in the treatment chamber (1), and a line (9,9') for the admission of a process gas into the treatment chamber (1). A microwave conductor (20,20' . . .) is connected with a generator (19,19' . . .) for igniting a plasma in the area of channels formed by a sheet-metal shroud (2,2') matching the configuration of the hollow body (4). A closure (7,7') is provided through which the filler opening (6, 6') of the hollow body (4) can be closed pressure-tight, and a line (9,9') for the process gas passes through the closure.

Abstract: Method for converting reactive gases which are sucked in at a low inlet pressure and are expelled at a higher outlet pressure by a dry multi-stage pump, in which method the reactive gases are physically and/or chemically converted into nonreactive components at a pressure situated between the inlet and outlet pressure, the conversion taking place, according to the invention, by means of gas discharge. The invention also relates to a dry multi-stage vacuum pump (3) and a plasma scrubber (4) which are particularly suitable for use in the method according to the invention.

Abstract: Hollow members having conduits for process gas and coolant are mounted in parallel on sidewall of a vacuum chamber with a sputtering cathode therebetween. Anode members having an L-shaped cross section are mounted over the hollow members and held in place by thumb screws in threaded bores of strips fixed to the chamber walls above the hollow members. Mask members having a Z-shaped cross section are mounted over the anodes and are also held in place by the thumb screws.

Abstract: The invention relates to a gas friction vacuum pump having at least two differently configured pump stages each having a rotor section and a housing section. In order to adapt the pump to different applications, the pump stages are detachably connected with each other so that different inlet stages can be mounted on the high-vacuum side.

Abstract: A leak indicator for detecting leaks in a vacuum system including a chamber and a system vacuum pump. The indicator is provided with a mass spectrometer for identifying the presence of a test gas in the system chamber and a high vacuum pump for producing the pressure required for operation of the mass spectrometer during a system leak test. A sealed conduit network is provided to connect the system chamber to the inlet of the mass spectrometer, and to the inlet side and exhaust side of the high vacuum pump. A first switching valve is provided within the sealed conduit in series between the system chamber and the inlets of the mass spectrometer and the high vacuum pump. Lastly, a constriction member is connected within the network conduit in series between the system chamber and the first switching valve to selectively provide a direct connection between the system chamber and the inlet side of the high vacuum pump, or between the system chamber and the exhaust side of the high vacuum pump.

Abstract: The invention relates to a process for regenerating a cryopump (1) that is equipped with an inlet valve (33), with cold surfaces (6, 8, 11) which have a temperature during operation of the pump that effects the condensation and/or adsorption of gases and which are heated for the purpose of regenerating them, the cryopump further including a backing pump (45) that is connected with the pump interior (9) by way of a valve (44). In this process, heating of the cold surfaces begins if the inlet valve (33) is closed and the connection between the pump interior (9) and the connected backing pump (45) is blocked so that, in addition to the temperature of the cold surfaces, the pressure in the pump interior also rises to values that lie above the corresponding values of the triple point of the gas to be removed.

Abstract: The invention concerns an apparatus for the plasma treatment of substrates in a plasma discharge excited by a high frequency between two electrodes 3, 8 to which power is supplied by a high frequency source, where the first electrode is configured as a hollow electrode 3 and the second one as an electrode 8 holding a substrate 7 and situated upstream of the hollow chamber 10 of the first electrode which it also passes. The hollow electrode is enclosed by a dark space shield and has an edge pointing in direction of the second electrode and also has projection located between the edge. These projections are on the same potential as the second electrode. The radio frequency power is thus decoupled from the substrate bias voltage (selfbias) and the distance between the first and the second electrode can be changed.

Abstract: A muffler arrangement includes a muffler with an essentially cylindrical housing having a face end with a central entrance opening and at least one exit opening arranged other than centrally on the face end. Baffles are disposed within the housing, the baffles being concentrically arranged pipe cylinders which extend alternatingly into one another and are closed at one end, for effecting a multiple deflection of gases traveling from the central entrance opening to the at least one exit opening. A coupling structure is secured to the muffler housing, for carrying the muffler in an operating position. The coupling structure has a central passage for connecting the muffler to an exhaust outlet of a machine, and has an other than central channel, surrounding the central passage, for connection to an exhaust gas output conduit for outputting exhaust gases from the muffler arrangement.

Abstract: There is disclosed a magnetic bearing cell of rotationally symmetrical construction, which includes a rotor having two rotating permanent ring magnets and a stator having a damping disk that projects into a first gap between the permanent ring magnets of the rotor. In order to improve the radial stability of the cell an additional permanent ring magnet is secured to the shaft and is spaced apart from one of the rotating permanent ring magnets to define a second gap therebetween. A ring disk that is secured to the stator projects into the second gap, the ring disk carrying an axially magnetized stator permanent ring magnet in the vicinity of the rotating permanent ring magnets of the rotor.

Abstract: A transport car open at the top and supported on rollers moves a substrate from a first coating chamber to a second coating chamber separated by a gate 7 running transversely of the direction of movement of the transport car 5. The gate 7 is formed of an upper gate part 8 and a lower gate part 9 forming a slot 10 which is adaptable to the cross section of the car. A cover associated with the top gate part and parallel to the direction of movement has an area greater than the car in order to minimize gas transfer between chambers.

Abstract: For use in a measuring and analysis instrument, a sensor including a sensor element responsive to changes in a quantity to be measured by the instrument. The sensor element is formed from a deformation heat-recoverable material having a predetermined range of temperatures in which recovery occurs. The sensor may include a control mechanism for maintaining the temperature of the sensor element substantially within the predetermined range. The sensor element forms a part of a circuit including a power source, and the control mechanism may include apparatus for selectively heating the sensor element. The sensor element is operatively connected to a signal device for sensing a physical characteristic of the sensor element and generating signals corresponding to the characteristic sensed. The signal device may include a temperature sensor, a force sensor, or a light sensor.

Abstract: A prefusing crucible in a closed prefusing tank is provided above a melting crucible in a closed vacuum container. Prefusing the charge material prevents thermal shock to the melt in the crucible from which monocrystals are drawn. A cover provided over the overflow from the prefusing crucible acts as a dust trap.

Abstract: The invention relates to a shaft seal for sealing a shaft pass-through (3) of vacuum apparatus, which accommodates a shaft (2), having at least one annular seal (4) which is disposed in a housing part and with which a barrier liquid (5) is associated, while the sealing part (6) of the annular seal facing the shaft (2) forms with the shaft an annular chamber (8) in which the barrier liquid (5) is provided, in order in this manner to bind particles formed by attrition.

Abstract: The invention relates to a sputtering cathode operating on the magnetron principle, which has a cathode body equipped with a target having a sputtering surface and a peripheral surface. In back of the target a magnet system is provided which has poles of opposite polarity lying one opposite the other for the production of magnetic lines of force which issue from the target and, after traversing arcuate paths, re-enter the target. The marginal areas of the target lying outside of the erosion zone are covered over by an extension of the dark space shield which runs parallel to the sputtering surface and has an inner margin. The dark space shield 11 is electrically floating and is separated from the target by a gap which is so large that no plasma can ignite between the target and dark space shield, so that only the exposed target is sputtered.

Abstract: Surface coating includes alternating first and second ternary layers, wherein the first layer TiAlN.sub.x has a higher nitrogen content and is considerably thinner than the second layer TiAlNy. The first layer is preferably applied by decreasing the nitrogen content of a reactive atmosphere from a maximum to a minimum during sputtering of a TiAl target. The second layer is then applied by sputtering the TiAl target over a longer period of time while the nitrogen content is maintained constant at the minimum. When a further first layer is applied, the nitrogen is again increased to the maximum.

Abstract: Coating of components and shapes by cathode sputtering of target material of a first cathode system (6) with concentration of a first discharge space (plasma cloud) in the vicinity of the target surface by a spatially closed magnetic field (plasma trap) opposite the target (12). The field strength is reduced in front of the target surface by an additional magnet associated with a lateral boundary of the target.

Abstract: A tubular stroboscope is interposed in the line of sight between a viewing glass and a process to be viewed in a chamber. The stroboscope is rotated about a central axis transverse to the line of sight and has a pair of diametrically opposed slots parallel to said axis, one slot being substantially wider than the opposite slot. The stroboscope is preferably driven by a jet of inert gas acting on a drive wheel inside the chamber, aspiration means being provided for dust removal.

Abstract: A vacuum chamber contains means for transferring a substrate for an information disc such as a CD from a loading station to a coating station, where material such as aluminum in wire form is evaporated in order to coat the substrate from above. An evaporation nozzle is continuously supplied with wire at a rate according to the coating thickness. The nozzle may be heated either resistively in order to evaporate the wire therein, or the wire may be directly heated by an induction coil.

Abstract: The invention relates to an apparatus for producing metal-free strips on film webs coated in a vacuum, particularly for capacitors comprising a housing that can be pressure-tight sealed. The apparatus has a device for taking in the film web and also comprises an evaporating source provided in the housing with at least one nozzle 36 for the application of the evaporating agent onto the passing web of film. The nozzle, for this purpose, comprises one or several openings 58 extending over the entire width of the film web through which the agent is applied onto the film web by vapor deposition.