Patents Assigned to Leybold-Heraeus
  • Patent number: 4823263
    Abstract: In automatic melting crucible tipping it is important that, starting from a certain angular position, the melting crucible (1) is tipped according to a predetermined model until emptying is complete. This model can be obtained, for example, by the so-called teach-in process and can be stored in an analog or digital memory (89). In order to prevent abrupt movement of the crucible (1) when the molten material touches the pouring lip (3) of the crucible (1) when the pour-lip angle has been reached, according to the invention a correction arrangement (108, 109, 37) is provided which enables the tipping process to proceed continuously and without abrupt movements even in the case of different pour-lip angles.
    Type: Grant
    Filed: July 14, 1986
    Date of Patent: April 18, 1989
    Assignee: Leybold-Heraeus
    Inventors: Friedrich-Werner Thomas, Jurgen Bruch
  • Patent number: 4561837
    Abstract: A rotor for a rotary slide-vane vacuum pump and a method of producing same comprises providing two rotor sections, each having a shaft stub, a rotor portion and a plane or contact surface produced by lathing, forming axial slot portions for accommodate one or more slide vanes through the contact surfaces, assembling the two rotor sections by the use of an assembling jig and fixedly joining the sections together and finishing the external surfaces of the assembled rotor with respect to at least one of length and diameter while the rotor is held in one and the same fixture.
    Type: Grant
    Filed: May 15, 1980
    Date of Patent: December 31, 1985
    Assignee: Leybold-Heraeus
    Inventors: Hanns-Peter Berges, Hans-Peter Kabelitz
  • Patent number: 4328763
    Abstract: A vaporizer for vacuum deposition installations has at least one crucible and a plurality of crucible-receiving recesses movable into a vaporizing position, a vapor-conducting device and a shutter for interrupting the flow of vapor. The vaporizer is capable of enabling a plurality of different substances to be vaporized in succession without mutual contamination by providing the vapor-conducting device wherein the device has a plurality of vapor screens which can be individually set down at the edges of the crucible-receiving recesses by relative movement between the vapor-conducting device and the crucible. The shutters have a plurality of lobes which can be individually moved over the particular vapor screen located in the vaporizing position. The drives associated with the vapor-conducting device and shutter are interconnected such that the same vapor screen and the same shutter lobe are always associated with a particular crucible-receiving recess.
    Type: Grant
    Filed: May 1, 1980
    Date of Patent: May 11, 1982
    Assignee: Leybold-Heraeus
    Inventors: Peter Sommerkamp, Walter Heil
  • Patent number: 4283260
    Abstract: The invention relates to a method and a circuit for the regulation of the discharge process in a cathode sputtering apparatus equipped with current, voltage and pressure regulators for controlling the sputtering process. A temperature rise in the discharge area in the course of operation is unavoidable, and, if constant pressure were maintained, this would result in a reduction of the charge carrier density and hence in a reduction of the discharge current, resulting simultaneously in a change in the rate of deposition. The invention resides in regulating to a programmed or constant value, not the pressure but the discharge current, doing so by varying the pressure within certain limits. For this purpose, while the sputtering voltage is maintained constant, a current reference level is given with which the actual current of the discharge is compared. Any current deviations are used for the purpose of operating the pressure regulator such that the current is maintained constant in the discharge area.
    Type: Grant
    Filed: May 2, 1979
    Date of Patent: August 11, 1981
    Assignee: Leybold-Heraeus
    Inventors: Friedrich W. Thomas, Konrad Priess