Patents Assigned to Leybold Material GmbH
  • Method of preparing indium oxide/tin oxide target for cathodic sputtering
    Patent number: 6187253
    Abstract: An indium oxide/tin oxide powder with 5-15 wt. % tin oxide is subjected to an annealing treatment at T≧1, 000° C. and is then partially reduced and subjected to hot isostatic pressing to produce a sputtering target with a density of at least 95% of the theoretical density and a thermal conductivity of at least 14 Wm−1K−1.
    Type: Grant
    Filed: November 3, 1997
    Date of Patent: February 13, 2001
    Assignee: Leybold Material GmbH
    Inventors: Martin Schlott, Wolfgang Dauth, Martin Kutzner, Bruce Gehman, Shawn Vahlstrom