Patents Assigned to Leybold Materials
  • Sputter target for cathodic atomization to produce transparent, conductive layers
    Patent number: 5480532
    Abstract: A target for production of transparent electrically conductive layers by cathode sputtering is produced from indium oxide-tin oxide powder mixtures or coprecipitated indium oxide-tin oxide powders. A target with especially high mechanical strength consists of an oxide ceramic material into which metallic phase components have been incorporated in a uniform and finely distributed manner and which has a density of more than 96% of the theoretical density of indium oxide/tin oxide consisting purely of oxide.
    Type: Grant
    Filed: November 9, 1994
    Date of Patent: January 2, 1996
    Assignee: Leybold Materials
    Inventors: Martin Schlott, Martin Kutzner, Martin Weigert, Uwe Konietzka, Bruce Gehman, Shawn Vahlstrom