Patents Assigned to Leybold System GmbH
  • Patent number: 5898127
    Abstract: A cover fitted about the periphery of an opening in a chamber wall is provided with a channel having therein both high frequency sealing elements which prevent escape of electromagnetic radiation, and a vacuum sealing element. The HF sealing elements are spaced apart by less than 1/4 of the minimum wavelength .lambda. to be shielded against, and are preferably held in the channel by a profiled element which also holds the vacuum sealing element. Alternatively, the channel may be provided in the chamber wall, or the sealing elements may he held in place without any channel.
    Type: Grant
    Filed: May 8, 1997
    Date of Patent: April 27, 1999
    Assignee: Leybold System GmbH
    Inventors: Manfred Schuhmacher, Gotz Teschner, Johannes Kunz, Oldrich Medek