Patents Assigned to LFE Corportion
  • Apparatus for depositing dielectric films using a glow discharge
    Patent number: 4066037
    Abstract: Disclosed are apparatus for forming dense and tightly adhering dielectric films on the surface of conductors, semiconductors, and insulators. The apparatus includes a reaction chamber into which a gas is admitted, dispersed, and subjected to a radio frequency exciting field to form a highly luminous glow discharge zone within the chamber. Another gas is admitted separately and is dispersed downstream from the glow discharge zone, immediately above the substrate to be coated.
    Type: Grant
    Filed: December 17, 1975
    Date of Patent: January 3, 1978
    Assignee: LFE Corportion
    Inventor: Adir Jacob