Abstract: The present invention provides a vibration assistant scribing apparatus for generating an indentation having a median crack of a depth on a substrate and the method for the same. The provided vibration assistant scribing apparatus includes a clamping device clamping a scribing wheel for scribing the substrate; a moving pedestal having a pressure device configured thereon, the pressure device providing a pressure to the scribing wheel through the clamping device; and a vibration generator configured on the clamping device and providing a vibration force to the scribing wheel through the clamping device, so as to increase the depth of the median crack thereby.
Type:
Application
Filed:
December 2, 2009
Publication date:
June 24, 2010
Applicant:
LIAO, Yunn-Shiuan
Inventors:
Yunn-Shiuan Liao, Yu-Sheng Hsu, Saw Chi Mya