Abstract: A tilting mirror MEMS variable optical attenuator attenuates light over a band of wavelengths with minimum wavelength dependent loss. The attenuator includes a lens that has a wedged input face and is made from a material that has high dispersion. The lens design causes different wavelengths to travel different paths through the attenuator such that wavelength dependent loss is reduced. The attenuator may be designed to have minimum wavelength dependent loss at a specified attenuation greater than zero.

Abstract: A 1×N wavelength selective switch which can function as a dynamic channel equalizer when N=1. In an exemplary arrangement, the present invention is a free-space device that includes a linear array of micromachined reflective elements for beam steering of individual wavelength channels. In at least some embodiments the array of reflective elements of the present invention provides a substantially seamless design such that the optical spectrum appears flat across the transition between actuators. Various embodiments provide high channel bandwidth with flat-top channel performance, low polarization dependence loss, low vibration sensitivity, extinction ratios greater than 40 dB over all temperatures, and very low levels of electrical and optical channel cross-talk.

Abstract: A simple and robust heat actuated steering device for use with mirrors and other optical components of optical telecommunications equipment is described, together with systems which implement such devices. The device uses differential heating between two legs of a flexured mount to allow tilting that can be used to steer an optical beam. Disturbances in the optical alignment, caused by temperature changes, of an optical device containing this component can be compensated by measuring the device temperature and using this to determine a command signal, for example as provided through a lookup table, to correct for device misalignment. Techniques for calibrating the device and establishing the correction data are also disclosed.

Abstract: A beam refraction apparatus includes an input fiber carrying an input beam. A wavelength dispersive element is coupled to the input fiber. The wavelength dispersive element spreads the input beam in at least one dimension as a function of wavelength and generates a dispersed beam. A controllable grating reflects the dispersed beam to the wavelength dispersive element and generates a recombined beam. The controllable grating provides a controllable reflectivity as a function of wavelength. An output fiber receives the recombined beam. A collimating optical member is coupled to the input and output fibers. The collimating optical member passes the input beam and the recombined beams in parallel and opposite directions.

Abstract: Various embodiments are methods and apparatuses for different steps in separating wafers into multiple wafer die. Some embodiments are adapted for dicing wafers having a front side and a back side, where the front side has processed devices, such as MEMS devices.

Abstract: The present invention is directed towards dynamic spectral shaping. Using a grating, the spectral band is spread across a MEMS or other suitable device array. The device may be the deformable grating modulator invented by Bloom et. al. (U.S. Pat. No. 5,311,360) or other suitable device. The invention also includes the coupling in and out of the fiber and may use polarization optics to ensure the grating is used in only one polarization where the diffraction efficiency is higher.

Abstract: A method and structure for isolating a die from thermally induced or pressure induced differential stresses between a die and a package includes providing an intermediate layer having therein a plurality of relief channels arranged to provide a flexure for absorbing such differential stresses. The relief channels define interior and peripheral portions of the intermediate layer, and the die is typically mounted on the interior portion. The peripheral portion of the intermediate layer is then bonded to the package. The channels may be disposed along both the upper and lower surfaces of the intermediate layer, or may be disposed on only one surface. Likewise, the channels may be disposed along one or both of the length and width of the upper or lower surfaces. Reservoir channels may also be provided to prevent adhesive from flowing and bridging the relief channels.

Abstract: Various embodiments are disclosed of apparatuses and methods for linearization. A linearized signal can control, for example, a microelectromechanical device, a microelectromechanical device, and/or a device controlling a modulated intensity of electromagnetic energy. Some embodiments include linearization functions such as a logarithm or x/(a+x).

Abstract: A fiber-optic modulator based on a micromachined grating device which is both polarization independent and achromatic in behavior is described. The device is a two dimensional grating or periodic structure which is symmetric in the X and Y axes. It is comprised of a membrane with holes cut in it that moves downward with the application of a voltage which starts diffracting light. The hole region may have a raised island to provide achromatic behavior.

Abstract: An optical switch uses a micromachined adjustable phase hologram device to route optical signals from an input fiber to selected output fibers is described. The adjustable phase hologram includes a large number of micromachined reflective ribbons which can be individually controlled and adjusted to produce a wide range of phase profiles to route the light beams from the input fiber. This optical switch is capable of dealing directly with optical signals, has fast switching speeds, is capable of routing WDM input signals, is polarization independent, is scalable to large switches, and avoids the complexity of other switches.