Abstract: The present invention relates to methods and systems for processing an exhaust stream containing a recyclable component mixed with other components and impurities to produce a high purity product that contains all of the recyclable component. One or more waste streams containing none of the recyclable component are also produced. The present invention particularly relates to the recovery of valuable recyclable components used in the manufacture of semiconductor devices.

Abstract: The present invention provides for an improved process for producing ozone which can be used to remove contaminants from gas streams in industrial processes. The improved process uses a separation device after the ozone generating system to separate the ozone from the oxygen gas and directs the ozone to the industrial process and the oxygen back to the feedstream entering the ozone generating system. The improved process further provides for the use of ozone so generated to removed contaminants from industrial process flue gas streams.

Abstract: A glass melting furnace has a gas inlet positioned proximate to a charging section oxy-fuel combustion region to introduce gas into the region and to at least partially displace gas having a partial pressure of alkali vapor from the region, and optionally a gas outlet is adapted to provide an exit for a volume of furnace atmosphere. A method for reducing alkali vapor corrosion of glass furnace refractory structures includes providing a gas inlet proximate to the oxy-fuel combustion region; introducing a volume of gas from the inlet into the region, displacing a volume of gas having a partial pressure of alkali vapor from the region; and, optionally providing a gas outlet adapted to provide an exit for a volume of furnace atmosphere.