Abstract: A flow rate control valve includes a base block and a valve opening/closing mechanism. The base block is provided with a valve chamber in which a valve seat through which a liquid raw material L flows, and a diaphragm that is brought into contact with or separated from the valve seat so as to close/open the valve seat are installed. The valve opening/closing mechanism includes a slide bearing part, a support post part, a piezoelectric actuator part, and a valve-actuating part. The slide bearing part is installed on the base block 1 and is provided with a bearing. The support post part includes a support post that is inserted slidably in the bearing and that moves upward and downward in a diaphragm direction.

Abstract: Provided is a vaporizer capable of reducing the occurrence of bumping in a vaporization space and thereby minimizing the pressure fluctuations therein, when a method not using an atomizer is employed. A vaporizer (1) includes a tank body (10), a porous member (30) disposed in the vaporizer (1) and heated, a supply tube (40) configured to supply a liquid material (L) to the porous member (30), and a gas discharge passage (7) configured to discharge a source gas (G) produced by vaporizing the liquid material (L) to the outside. An outlet (41) of the supply tube (40) is disposed in contact with or in close proximity to the porous member (30). When the outlet (41) is disposed in close proximity to the porous member (30), a separation distance (H) between the outlet (41) and the porous member (30) is not greater than a distance from the outlet (41) to a bottom of a droplet of the liquid material (L) formed and suspended at the outlet (41) by surface tension.

Abstract: A vaporizer is provided with a vaporizing chamber heated by heaters; a primary filter positioned in a bottom end portion of the vaporizing chamber and heated by the heater; a liquid material supply portion for dropping down a flow-controlled liquid material from upper portion of the vaporizing chamber toward the primary filter; a carrier gas guiding passage for guiding a carrier gas into the underside of the primary filter; and a material delivering passage for discharging a mixed gas including the carrier gas and a vaporized liquid material from the top of the vaporizing chamber. The liquid material dropped down onto the primary filter is partially vaporized, while the rest thereof is atomized by being subjected to bubbling effect provided by the carrier gas flowing from underneath.

Abstract: A vaporizer is provided with a vaporizing chamber heated by heaters; a primary filter positioned in a bottom end portion of the vaporizing chamber and heated by the heater; a liquid material supply portion for dropping down a flow-controlled liquid material from upper portion of the vaporizing chamber toward the primary filter; a carrier gas guiding passage for guiding a carrier gas into the underside of the primary filter; and a material delivering passage for discharging a mixed gas including the carrier gas and a vaporized liquid material from the top of the vaporizing chamber. The liquid material dropped down onto the primary filter is partially vaporized, while the rest thereof is atomized by being subjected to bubbling effect provided by the carrier gas flowing from underneath.

Abstract: A vaporizer is provided with a vaporizing chamber heated by heaters; a primary filter positioned in a bottom end portion of the vaporizing chamber and heated by the heater; a liquid material supply portion for dropping down a flow-controlled liquid material from upper portion of the vaporizing chamber toward the primary filter; a carrier gas guiding passage for guiding a carrier gas into the underside of the primary filter; and a material delivering passage for discharging a mixed gas including the carrier gas and a vaporized liquid material from the top of the vaporizing chamber. The liquid material dropped down onto the primary filter is partially vaporized, while the rest thereof is atomized by being subjected to bubbling effect provided by the carrier gas flowing from underneath.

Abstract: A vaporizer is provided with a vaporizing chamber heated by heaters; a primary filter positioned in a bottom end portion of the vaporizing chamber and heated by the heater; a liquid material supply portion for dropping down a flow-controlled liquid material from upper portion of the vaporizing chamber toward the primary filter; a carrier gas guiding passage for guiding a carrier gas into the underside of the primary filter; and a material delivering passage for discharging a mixed gas including the carrier gas and a vaporized liquid material from the top of the vaporizing chamber. The liquid material dropped down onto the primary filter is partially vaporized, while the rest thereof is atomized by being subjected to bubbling effect provided by the carrier gas flowing from underneath.

Abstract: A vaporizer can efficiently vaporize a liquid material under a depressurized atmosphere. The liquid material is temporarily stored in a liquid storing chamber, and is supplied to a vaporizing chamber set in the depressurized atmosphere via a small aperture. An inlet of the liquid storing chamber is opened or closed by a valve body, which is moved by an actuator controlling a degree of opening of the valve body.

Abstract: A valve structure for use in a vaporizer is provided including: a valve seat 16 confronting a vaporization area Y in which a liquid feedstock 106 is to be vaporized and having a liquid feedstock feeding port 15a for introducing the liquid feedstock 106 into the vaporization area Y, and a valve body 1 movable so as to abut against and depart from the valve seat 16 for opening/closing a flow channel extending from the liquid feedstock feeding port 15a to the vaporization area Y, the valve body 1 being capable of controlling the degree of opening of the flow channel thus opened thereby controlling the flow rate of the liquid feedstock 106 flowing through the flow channel into the vaporization area Y.

Abstract: A printing device of the type for printing a strip-like printing article having a printing impression roller which is movable forwards while rotating in one direction and backwards while rotating in the opposite direction, along a line perpendicular to the direction of feeding a strip-like printing article is provided with a slide base which is slidable along rails which extend in a direction perpendicular to the direction of feeding of the printing article. Ink tanks and a roller train are mounted on the slide base. The roller train includes an ink fountain roller, a duct roller whose peripheral surface is in contact with the ink fountain roller, a stationary metallic roller whose peripheral surface is in contact with the duct roller, a first ink distribution roller whose peripheral surface is in contact with the metallic roller, and a second ink distribution roller whose peripheral surface is in contact with the first ink distribution roller.

Abstract: In a liquid vaporizing/feeding method of the present invention, carrier gas is forced out at a very high speed against a mass flow controlled liquid feedstock to change the liquid feedstock into a mist; after that, the mist of the feedstock is vaporized and mixed with the carrier gas, and a mixture of the mist and carrier gas is furnished to a succeeding process. A liquid vaporizer/feeder according to the present invention comprises a main vaporized unit which is cylindrical in shape, and a mist nozzle having an inside nozzle fixed in an inlet of the main vaporizer unit for feeding liquid feedstock into the main vaporizer unit and an outside nozzle encompassing an opening of the inside nozzle for forcing a carrier gas at high speed around the opening of the inside nozzle, and the main vaporizer unit has an evaporation space where a mixed mist of the liquid feedstock with the carrier gas that is forced out of the mist nozzle is vaporized.

Abstract: A liquid vaporizer-feeder has a unitary housing structure for both a control valve for controlling the amount of a liquid passing therethrough and a vaporization valve for causing the liquid from the control valve to be vaporized and transported out by a carrier gas. The housing structure has a throughhole through which the two valves are connected. The throughhole is short and narrow, and has a portion made even narrower such that the pressure in the liquid passing therethrough is increased, preventing bubbles from forming in the throughhole. As a result, vaporized liquid can be supplied at a steadier rate, for example, to a reaction chamber.

Abstract: A mass flow controller having a bypass portion provided in a body through which a large amount of gas is passed and a sensor portion, laid between a primary chamber which is an inlet of the bypass portion and a secondary chamber which is an outlet of the bypass portion, through which gas flows at a small flow rate proportional to the flow rate of the gas passed through the bypass portion and capable of measuring the total flow rate of gas by measuring the flow rate in the sensor portion. The body is partitioned by a bulkhead into a primary chamber and a secondary chamber. The primary chamber is provided with an inlet for gas inflow and the secondary chamber is provided with an outlet for gas outflow. The bulkhead is provided with a plurality of through holes for connecting the primary chamber to the secondary chamber, and bypass elements selected depending on the flow rate in the bypass portion are fitted in the through holes in the bulkhead.

Abstract: A mass flow controller having a bypass portion provided in a body through which a large amount of gas is passed and a sensor portion, laid between a primary chamber which is an inlet of the bypass portion and a secondary chamber which is an outlet of the bypass portion, through which gas flows at a small flow rate proportional to the flow rate of the gas passed through the bypass portion and capable of measuring the total flow rate of gas by measuring the flow rate in the sensor portion. The body is partitioned by a bulkhead into a primary chamber and a secondary chamber. The primary chamber is provided with an inlet for gas inflow and the secondary chamber is provided with an outlet for gas outflow. The bulkhead is provided with a plurality of through holes for connecting the primary chamber to the secondary chamber, and bypass elements selected depending on the flow rate in the bypass portion are fitted in the through holes in the bulkhead.

Abstract: A mass flowmeter comprising heat sensitive coils mounted at an upstream position and a downstream position of a conduit through which a fluid flows. The heat sensitive coils have a resistance variable with the fluid temperature, and are each included in a constant temperature difference circuit. This circuit further includes an ambient temperature detecting resistor having approximately the same characteristics as the heat sensitive coils, and a temperature difference setting resistor having approximately zero temperature coefficient. These resistors are connected in series to the heat sensitive coil. The circuits are connected to a control unit which controls differences between temperatures of the heat sensitive coils and ambient temperature to be approximately the same as a value set by the temperature difference setting resistor. A mass flow rate of the fluid through the conduit being measured by detecting a difference in amounts of energy supplied to the heat sensitive coils.