Abstract: A beam scanning system and attached system of beam stabilization is utilized for ensuring the parallel transport of a scanned orthogonally deflected coherent light beam. A first scanning stage with right angle reflecting mirror scans the beam in the X-direction and reflects the scanned beam to the Y-direction. A second scanning stage with right angle reflecting mirror is mounted to the first scanning stage. This second scanning stage deflects the scanning beam in the Y-direction and reflects the beam downward. The scanning beam has divided out a small portion thereof as a reference beam. This reference beam is then diverted to precisely opposite orthogonal paths to the incidence of the scanning beam. The precise opposite orthogonal reference path results in upward deflection of the reference beam. After upward deflection, the reference beam is reflected at an optical flat and reflected back through the reference path. After retracing the orthogonal reference legs, the beam is diverted to a quad detector.

Abstract: A apparatus and process for ablating a matrix of high density vias in a flexible substrate. The apparatus is cantilevered on a horizontal shelf from a partition where it can be rigidly supported. A vacuum container reciprocates towards and away from the partition and supports the horizontal shelf by permitting supporting casters to bear on and be supported by the reciprocating container. When the container is away from the partition, servicing of the apparatus as well as the insertion an removal of substrate can occur. When the container is adjoined to the partition, a vacuum can be drawn on the apparatus and processing commenced. A continuous flexible substrate is provided extending in a circuitous path between a supply roll and a take up roll, all interior of the container. The flexible substrate is maintained under constant tension and incrementally advanced. The substrate is incrementally advanced and stopped, passing across a table.