Abstract: A scanning tunneling microscope is disclosed which includes a frame assembly having upper frame members coupled to lower frame members by an external vibration isolation structure, a sample carousel configured to receive at least one sample to be scanned, and a probe carousel configured to receive at least one probe module including a probe tip. The sample and probe carousels are coupled to the upper frame members and sample and probe actuators are provided to rotate the carousels. A positioning mechanism is used to maintain a scanning distance between the probe tip and the sample carousel. A control unit controls the overall operation of the actuators to rotate the carousels and the operation of the positioning mechanism to maintain the scanning distance.

Abstract: The ion flux obtainable from an otherwise conventional ion source, to project a controlled ion beam at a target contained within an evacuated target chamber, is significantly enhanced by providing a flow of an ionizable gas directly into the ion source canister instead of being supplied into the target chamber. Flux enhancement values exceeding an order of magnitude may thus be obtained with ionizable gases such as argon, helium and neon. The highly enhanced ion flux is particularly advantageous for applications such as sputtering and ion scattering spectroscopy (ISS).