Patents Assigned to Lockheed Missiles and Space Comapny, Inc.
  • Gray scale microfabrication for integrated optical devices
    Patent number: 5480764
    Abstract: A monolithically integrated, micro-fabricated optical device for use in photonic applications has at least one waveguide surface configuration which cannot be fabricated by binary processing. The optical device comprises a plurality of layers of substrate materials. The material in at least one layer has an index of refraction different from the index of retraction of the material in an adjacent layer. A waveguide surface is formed at an interface between the layers and has a configuration fabricated by use of a gray scale mask.
    Type: Grant
    Filed: March 4, 1994
    Date of Patent: January 2, 1996
    Assignee: Lockheed Missiles and Space Comapny, Inc.
    Inventors: George Gal, William W. Anderson, Bruce J. Herman, Marc A. Stiller