Abstract: An automatically programmable tilting mechanism for holding a scribe tool at varying angles using an aerostatic bearing. The air bearing secures the scribe tool about its longitudinal shank and generally allows for free axial movement while the tool holding structure prevents rotation of the scribe tool, thus providing extremely fine compliance and force application of the scribe tool point against the substrate. During a scribing process, the tilting mechanism regularly adjusts the angle of the scribe tool relative to the substrate so that a fresh cutting edge is always being employed in the scribing process.

Abstract: A breaking device for separating a substrate along a scribe line formed in a surface of the substrate and spaced a predetermined distance D from a previously formed scribe line. The breaking device comprises a body member and a pair of laterally spaced annular profile members carried by the body member, the profile members each having a wall structure terminating in the contact surface. The amount of lateral spacing between the profile members is substantially equal to ND, where N is an integer, so that the contact surfaces of the pair of profile members are arranged for surface contact with a substrate on opposite sides of the scribe line, with one of the contact surfaces positioned adjacent the previously formed scribe line.