Abstract: A bubbler for use in vapor generation systems that minimizes splashing and the formation of aerosol droplets of liquid, which are carried out of the bubbler in the vapor stream and result in erratic mass transfer of the process chemical liquid. A closed stainless steel vessel contains a carrier gas distribution plenum that distributes the carrier gas to a plurality of small diameter generator tubes, which are submerged into the process chemical liquid. The length, inside diameter and number of the generator tubes are designed to inject a high velocity, small diameter stream of carrier gas into the liquid such that a long small diameter cylinder of carrier gas is created in the process chemical liquid. The surface tension of the liquid-gas interface causes the cylinder of gas to be pinched off at intervals along the length of the cylinder to produce a plurality of small bubbles the diameter of which is largely independent of the carrier gas flow rate.

Abstract: Apparatus (15, 30) and methods for performing acoustical measurements are provided having some and preferably all of the following features: (A) the system (15, 30) is operated under near-field conditions; (B) the piezoelement (40) or piezoelements (40, 48) used in the system are (i) mechanically (41, 49) and electrically (13, 16) damped and (ii) efficiently electrically coupled to the signal processing components of the system; (C) each piezoelement (40, 48) used in the system includes an acoustical transformer (42, 50) for coupling the element to a gaseous test medium (9); (D) speed of sound is determined from the time difference between two detections of an acoustical pulse (81, 82) at a receiver (40, FIG. 3; 48, FIG.

Abstract: Apparatus and methods for performing acoustical measurements are provided having some and preferably all of the following features: (1) the system is operated under near-field conditions; (2) the piezoelement or piezoelements used in the system are (a) mechanically and electrically damped and (b) efficiently electrically coupled to the signal processing components of the system; (3) each piezoelement used in the system includes an acoustical transformer for coupling the element to a gaseous test medium; (4) speed of sound is determined from the time difference between two detections of an acoustical pulse at a receiver; (5) cross-correlation techniques are employed to detect the acoustical pulse at the receiver; (6) fast Fourier transform techniques are used to implement the cross-correlation techniques; and (7) stray path signals through the body of the acoustic sensor are removed from detected signals prior to signal analysis.

Abstract: Apparatus and methods for performing acoustical measurements are provided having some and preferably all of the following features: (1) the system is operated under near-field conditions; (2) the piezoelement or piezoelements used in the system are (a) mechanically and electrically damped and (b) efficiently electrically coupled to the signal processing components of the system; (3) each piezoelement used in the system includes an acoustical transformer for coupling the element to a gaseous test medium; (4) speed of sound is determined from the time difference between two detections of an acoustical pulse at a receiver; (5) cross-correlation techniques are employed to detect the acoustical pulse at the receiver; (6) fast Fourier transform techniques are used to implement the cross-correlation techniques; and (7) stray path signals through the body of the acoustic sensor are removed from detected signals prior to signal analysis.

Abstract: Apparatus and methods for performing acoustical measurements are provided having some and preferably all of the following features: (1) the system is operated under near-field conditions; (2) the piezoelement or piezoelements used in the system are (a) mechanically and electrically damped and (b) efficiently electrically coupled to the signal processing components of the system; (3) each piezoelement used in the system includes an acoustical transformer for coupling the element to a gaseous test medium; (4) speed of sound is determined from the time difference between two detections of an acoustical pulse at a receiver; (5) cross-correlation techniques are employed to detect the acoustical pulse at the receiver; (6) fast Fourier transform techniques are used to implement the cross-correlation techniques; and (7) stray path signals through the body of the acoustic sensor are removed from detected signals prior to signal analysis.