Patents Assigned to LOTUS APPLIED TECHNOLOGY
  • Publication number: 20250197997
    Abstract: This disclosure relates to methods and systems for selective atomic layer deposition. Cycle-by-cycle post-processing of the thin film occurs during growth of the thin film, instead of conducting post-processing after completion of the thin film. Thin films with improved properties result.
    Type: Application
    Filed: December 18, 2023
    Publication date: June 19, 2025
    Applicant: LOTUS APPLIED TECHNOLOGY
    Inventor: ERIC DICKEY