Patents Assigned to LOTUS SYSTEMS GMBH
  • Batch processing system in an in-line facility
    Publication number: 20110020096
    Abstract: Methods and apparatuses for a batch processing system with in-line interfaces are provided to batch processing substrates in an in-line processing facility. In an embodiment, the batch processing system comprises carrier assembling and carrier disassembling stations interfacing the in-line path and the batch processing stations.
    Type: Application
    Filed: July 26, 2010
    Publication date: January 27, 2011
    Applicant: LOTUS SYSTEMS GMBH
    Inventor: Joachim Mink