Abstract: A patterned substrate includes a substrate body and a plurality of solid patterns. The solid patterns are set on the substrate body, and at least partial pitches between the solid patterns are different.
Abstract: A patterned substrate comprises a substrate body and a plurality of solid patterns disposed on the substrate body. The pitch of at least a part of the adjacent solid patterns is between 1.5 ?m and 2.5 ?m, the space of at least a part of the adjacent solid patterns is between 0.1 ?m and 0.7 ?m, and the height of at least a part of the solid patterns is between 0.7 ?m and 1.7 ?m. An electro-optical semiconductor element containing the patterned substrate is also disclosed.