Abstract: A method of performing regional heating of a substrate by electromagnetic induction heating. The method may include applying a semiconductor film to the substrate and controllably energizing a coil positioned near the substrate. The energized coil(s) thereby generates a magnetic flux, which induces a current in the substrate and/or the semiconductor film, thereby heating the substrate and/or semiconductor film. The method may also include relative motion between the coil and the substrate to provide translation heating of the semiconductor film. Additionally, a crystal seeding mechanism may be employed to further control the crystallization process.
Abstract: A device includes an electrically conductive substrate, one or more intermediate layer(s) in contact with the electrically conductive substrate and/or one or more interconnect layer, and a surface mounted electrical component contacting the interconnect layer.
Type:
Application
Filed:
October 5, 2020
Publication date:
March 2, 2023
Applicant:
LUX SEMICONDUCTORS, INC.
Inventors:
Shane T. McMAHON, Graeme HOUSSER, Lewis R. HABER
Abstract: A method of performing regional heating of a substrate by electromagnetic induction heating. The method may include applying a semiconductor film to the substrate and controllably energizing a coil positioned near the substrate. The energized coil(s) thereby generates a magnetic flux, which induces a current in the substrate and/or the semiconductor film, thereby heating the substrate and/or semiconductor film. The method may also include relative motion between the coil and the substrate to provide translation heating of the semiconductor film. Additionally, a crystal seeding mechanism may be employed to further control the crystallization process.