Patents Assigned to LUXEL CORPORATION
  • Monolithic EUV transparent membrane and support mesh and method of manufacturing same
    Patent number: 9606459
    Abstract: An apparatus according to the present invention comprises a membrane layer and a supporting supportive mesh, wherein the membrane layer and the supportive mesh form a monolithic structure that absorbs less than ten percent of EUV (Extreme Ultraviolet) light passing through it in which the membrane layer is composed of a metal-ceramic composite.
    Type: Grant
    Filed: December 29, 2014
    Date of Patent: March 28, 2017
    Assignee: LUXEL CORPORATION
    Inventors: Bruce Lairson, David Grove, Heidi Lopez, Travis Ayers