Abstract: A semiconductor device and associated method of fabrication in which the device includes a semiconductor substrate having a cavity therein extending in a frame pattern. An insulating layer such as one of silicon nitride is deposited in the cavity followed by the deposition of polysilicon to substantially fill the cavity and provide structural support. An epitaxy layer is formed over the surface of the substrate along with a second insulating layer having windows defined therein for enabling ohmic contact with the epitaxy layer and substrate, respectively. Metallization is deposited to form separate beam leads to provide ohmic contact at the epitaxy layer and substrate.

Abstract: A non-invasive temperature monitoring apparatus used in association with a guided wave member that may be for the purpose of sterilization and that is adapted for microwave heating of a substance that is absorptive at microwave frequencies and that is held in some type of container or connector that is transparent at microwave frequencies. The apparatus comprises a length of waveguide. A coupling aperture is defined in the guided wave member. The length of waveguide is supported with one end thereof about the coupling aperture. A microwave radiometer detection circuit is also coupled from the length of waveguide for detecting on a continuing basis the temperature of the substance which is usually liquid being heated by the microwave energy.

Abstract: A process for the fabrication of semiconductor components and in particular a process in which the components are fabricated with a controlled spacing of etched channels. The process is in particular utilized in fabricating a monolithic array of elements such as a pin diode array. The process of the present invention combines the use of an anisotropic silicon etching process for the desired device geometries with a means of defining all device surface topology by substantially a single photomask thus eliminating critical mask alignment. A second embodiment of the invention is also described employing fewer layers of deposition with a double photomask step.

Abstract: A coaxial connector having a pair of members, each of substantially the same construction, and each including means at an outer side thereof for receiving a first coax cable and means at an inner side thereof defining a section of waveguide. In each member there is a transition means that intercouples the coax cable and the section of waveguide. The pair of members are supported together by a support means and there is further provided alignment means for holding the sections of waveguide in alignment.

Abstract: A polarized receiving apparatus in which there is provided a first waveguide for transmitting polarized signals and a second waveguide secured to the first for receiving polarized signals at one end thereof. An antenna means is provided having integrally formed portions including a receiver probe portion disposed in the second waveguide and extending generally axially of the second waveguide for receiving one polarization of the incident signal, a launch probe portion concentric with the axis of the first waveguide and extending generally axially of the first waveguide for launching said signal therein, and a drive portion intermediate the receiver and launch probe portions with said drive portions including a first gear. A drive source is supported in a housing member which defines the first waveguide and this drive source comprises at least a second gear adapted to mesh with the first gear for driving the antenna means.

Abstract: A waveguide bandpass filter having multiple waveguide sections including alternating ridge waveguide sections and evanescent waveguide sections. The ridge waveguide sections define a resonant cavity and the evanescent waveguide sections reactively load the resonant cavity thus intercoupling the ridge waveguide sections so as to provide a low loss filter having high attenuation, not only at adjacent stop band frequencies, but also at harmonics of the pass band.

Abstract: An apparatus used in association with a needle for infusing a liquid. This apparatus is for detecting the infiltration of the liquid through the vascular wall into the perivascular tissues. The apparatus includes a non-invasive conformal microwave antenna means adapted to be positioned over the area where liquid infusion occurs. A microwave radiometer connects from the antenna means for detecting sub-cutaneous temperature at the site thereof. A reference antenna means is also employed so that a proper temperature differential can be established. In an alternate version of the invention, switching means is provided so that upon detecting an alarm condition, the liquid can be immediately terminated and a neutralizing agent can be introduced to the needle.

Abstract: A microwave sterilizer for sterilizing a connector or coupling that interconnects a first conduit from a source of liquid to be infused into a living body to a second conduit implanted in the body. The apparatus of the invention comprises a housing having first and second members forming a guided wave structure adapted to be removably closed around the coupling or connector and further including first and second clamping means. The clamping means are adapted to clamp respective conduits and are operable to isolate a charge of the liquid within the connector. A microwave source is used to generate energy which in turn is coupled to the guided wave structure to cause heating of the liquid charge to a temperature level to cause sterilization so as to destroy substantially all form of bacteria therein. After a predetermined heating sequence, the apparatus is released and the bag side clamping means is first released so as to pass the sterilized charge of liquid into the source or bag.

Abstract: A microwave applicator for applying microwave energy to living tissue for providing uniform heating without hot spots. The applicator includes a first electrical conductor and a second electrical conductor substantially shielding the first conductor in a transmission line configuration capable of propagating microwave energy in a frequency band suitable for heating living tissue. The first conductor has an unshielded portion extending a distance beyond the second conductor and there is additionally provided a coil as a third electrical conductor surrounding the extending portion of the first conductor and connected between the ends of the first and second conductors. The applicator is preferably configured for insertion through an opening into the body and includes a substantially smooth dielectric sleeve covering the coil of the third conductor.

Abstract: A method of making a microwave semiconductor component and concurrently forming therewith a mounting membrane adapted for positioning the semiconductor component in an RF transmission medium such as a waveguide. Substantially concurrently with the deposition of a metallic film in connection with forming a semiconductor elements, there is deposited a metallic membrane on the base silicon substrate and outside of the circuit element. The outer periphery of the base substrate is removed to expose the membrane. The metallic membrane is preferably of gold.

Abstract: A polarized receiving apparatus in which there is provided a first waveguide for transmitting polarized signals and a second waveguide secured to the first for receiving polarized signals at one end thereof. An antenna means is provided having integrally formed portions including a receiver probe portion disposed in the second waveguide and extending generally axially of the second waveguide for receiving one polarization of the incident signal, a launch probe portion concentric with the axis of the first waveguide and extending generally axially of the first waveguide for launching said signal therein, and a drive portion intermediate the receiver and launch probe portions with said drive portion including a first gear. A drive source is supported in a housing member which defines the first waveguide and this drive source comprises at least a second gear adapted to mesh with the first gear for driving the antenna means.

Abstract: A resonant-cavity type electronic tube having mechanically-operable tuning vanes associated with its resonant-cavity structure and disposed within an evacuable envelope. A support member is provided within the envelope for adjusting the tuning vanes relative to the resonant-cavity structure, so as to tune the frequency of resonance of the structure step-wise in accordance with a predetermined program. The tuning is carried out with a step motor, having a stator and armature with the envelope having a portion extending between the stator and armature for enclosing the armature within the evacuable space containing the tuning vanes and the resonant cavity structure. The armature is coupled to the tuning vanes for altering the position thereof relative to the resonant-cavity structure in fixed relation to the displacement of the armature relative to the stator. Electrical signals are coupled to the stator for establishing a programmable series of displacements of the armature relative to the stator.

Abstract: An electron tube having a cathode and an anode with the anode subtantially surrounding the cathode and providing an electron-interaction space therebetween for providing a magnetic field having a substantial component oriented in the axial direction traversing this interaction space. The cathode structure is of reduced axial direction dimension for permitting the length of the magnetic field component to be minimized. The electron tube includes a substantial tubular cathode and a support means that is axially oriented and that is disposed adjacent to the cathode and is spaced away from the cathode substantially throughout its axial length. This support means is attached at one end to one end of the cathode and at the other end is supported at a vocation in the electron tube.

Abstract: A combined mounting and tuning structure for a dielectric resonator comprised of a stack of a dielectric resonator body, a resilient body of dielectric material and an electrical tuning conductor. A fastening means preferably in the form of a dielectric screw threadedly engaged in a base wall of an enclosure and by turning the fastening means, the tuning conductor is brought closer to the resonator, and the resonant frequency of the resonator is thereby adjusted while also providing a clamping force on the stack so as to maintain its position relative to the base wall. The dielectric resonator tuner of the invention is shown in oscillator and filter circuit embodiments.

Abstract: The microwave system is employed for the detection of cancerous tumors and is particularly effective in the early detection of such tumors. The system is of the dual type, combining in a single unit a passive radiometer with an active microwave transmitter. The sensitive passive microwave radiometer is adapted to sense subsurface temperatures, coupled with a solid state microwave transmitter for providing localized heating of the subsurface tissue, thereby taking advantage of the differential heating due to vascular insufficiency associated with the thermal characteristics of tumors, thus highlighting and enhancing early detection of cancer. The radiometer frequency is preferably higher than the microwave heating frequency with the microwave radiometer operating in C band and the transmitter in L band. An applicator forms the means by which the system couples to the radiating or emitting surface including a simple TE.sub.1-0 mode aperture defined by a single-ridged waveguide.

Abstract: Epitaxial layers of single crystals of gallium arsenide and similar compounds are formed by vapor deposition. A carrier gas flow is passed through a liquid halide of a group VB material to obtain a first vapor having a halogen, carrier gas and group VB material. The carrier gas flow is monitored and adjusted to obtain a predetermined mass of halogen and second material in this raw vapor. A final reactor input vapor is obtained with constant concentration and constant flow going into a reactor by monitoring the total volume of carrier gas in the raw vapor as added per unit of time and adjusting the raw vapor by adding a volume of additional carrier gas to a predetermined value to form a final reactor input vapor. The reaction and deposition of the epitaxial layer is then carried out in a reactor.