Patents Assigned to M+W Zander Facility Engineering GmbH & Co. KG
  • Clean room
    Patent number: 6306189
    Abstract: A clean room is provided through which clean air/recirculated air flow, and which comprises at least one processing unit and/or processing surface to which is supplied a gaseous medium of known composition, wherein the gaseous medium can be supplied to the clean room separately.
    Type: Grant
    Filed: August 5, 1999
    Date of Patent: October 23, 2001
    Assignee: M+W Zander Facility Engineering GmbH & Co. KG
    Inventor: Manfred Renz